壓電平台因兼具快速響應與高解析度之能力，所以已被廣泛地應用於微/奈米尺度的各種精密量測系統中。壓電平台的致動器是由壓電材料所構成，壓電材料會因輸入電壓的作用而產生結構形變。然而，壓電材料本身具有高度非線性之特性，例如遲滯與蠕變之效應，導致非常難以設計一個理想的精確控制器。另外，由於以三角波作為驅動信號的傳統柵欄式掃描軌跡，由於不平滑的軌跡因素，導致它非常容易引起壓電平台的高頻共振問題，進而影響平台之定位精確度。為了減緩軌跡所引起的共振問題，本研究提出一種平滑式的柵欄式軌跡，可以漸緩軌跡所引起的高頻振盪問題。此外，本研究亦開發一種抑制非線性行為的控制策略，它同時結合了 Bouc-Wen 前饋補償和固定時間收斂梯度流控制器與擴展狀態觀測器。最後，我們透過一連串的模擬以及實驗比較來驗證所提出軌跡與控制方法之優越性。;Due to their fast response and high resolution, piezoelectric stages have been widely applied in various micro-/nanoscale high-precision measurement systems. The actuators of piezoelectric stages are made of piezoelectric materials, which deform structurally in response to applied voltage. However, piezoelectric materials inherently exhibit strong nonlinear characteristics, such as hysteresis and creep, making it challenging to design an ideal and precise controller. In addition, conventional raster scanning trajectory driven by triangular wave signals tends to cause high-frequency resonances due to its nonsmoothed profiles, which can negatively impact positioning accuracy. To mitigate the resonance problems induced by such a trajectory, this study proposes a smoothed raster scanning trajectory that alleviates high-frequency oscillations. Moreover, we develop a control strategy to suppress nonlinear behaviors by integrating a Bouc-Wen feedforward compensation, a fixed-time stable gradient flows (FxTS-GF) controller, and an extended state observer (ESO). Finally, a series of simulations and experimental comparisons are conducted to validate the superiority of the proposed trajectory and control method.
