本研究提出之三軸磁力感測器，其結構設計包含兩個出平面結構 與一個同平面結構。出平面部分採用翹翹板式設計，透過改變激發電 流的路徑，使內部與外部結構分別獨立作動；而同平面結構則與出平 面設計相似，可依需求執行單模態或雙模態的量測。在出平面翹翹板 結構設計中，使用扭轉彈簧以增強其旋轉能力，同時於所有元件內部 導入殘留應力補強外框、增加電容數量，並優化激發電流的繞圈數與 路徑設計，以提升元件的穩定性與靈敏度。 在激發電流為7.5 mA 下，感測器的 Bx 與 By 的靈敏度為 114 V/T；在激發電流為30 mA下，Bz於單模態操作下則可達到32 V/T （外部）與14 V/T（內部）的靈敏度。 為進一步提升元件性能，本研究採用真空封裝技術，有效降低空 氣阻尼，提高整體靈敏度與穩定性。該三軸磁力感測器適用於壓力量 測、定位系統等高精度應用場域。;This study proposes a three-axis magnetic sensor, featuring a structural design that includes two out-of-plane components and one in plane component. The out-of-plane part adopts a seesaw-style design, where the internal and external structures operate independently by altering the excitation current path. The in-plane component shares a similar design and can perform either single-mode or dual-mode measurements as needed. In the out-of-plane seesaw structure, torsional springs are used to enhance rotational capability. Additionally, residual stress is introduced into all internal elements to reinforce the outer frame, increase the number of capacitors, and optimize the number of coil turns and current path design to improve the device’s stability and sensitivity. Experimental measurements show that, under an excitation current of 7.5 mA, the sensitivities for Bx and By are 114 V/T. At 30 mA excitation, the Bz axis achieves a sensitivity of 32 V/T (external) and 14 V/T (internal) in single-mode operation. To further enhance device performance, vacuum packaging technology is employed to effectively reduce air damping, thereby improving overall sensitivity and stability. In summary, the proposed three-axis magnetic sensor is suitable for high-precision applications such as pressure sensing and positioning systems.
