利用高品質因子外腔自注鎖定的窄線寬雷射

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姓名

廖振翔(Zheng-Xiang Liao) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

利用高品質因子外腔自注鎖定的窄線寬雷射
(Narrow linewidth laser with self-injection locking by high quality external cavity)

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摘要(中)

雷射線寬是評斷雷射優劣的重要指標之一，在如光通訊、LiDAR、光原子鐘
等不同領域中扮演著舉足輕重的腳色，隨著技術的進步，對雷射線寬的要求也愈
加嚴苛。本論文提出了一種利用自注入鎖模技術降低雷射線寬的方法。該方法將
微環形共振腔作為雷射的外部腔體，透過 Rayleigh 背向散射的能量回授來實現
鎖模，進一步減少雷射線寬。與市售的外部腔體雷射相比，此技術更具經濟性，
且與互補式金屬氧化物半導體（CMOS）製程技術高度兼容，具備高集成密度的
優勢。
在本論文中也會介紹微環形共振腔的製程流程。為了驗證自注入鎖模技術對
雷射線寬的影響，因此在論文中將詳細探討線寬量測技術，根據不同的雷射線寬，
需選擇適當長度的延遲光纖，並在量測時調整極化至頻譜呈現勞倫茲曲線。此外，
研究發現，調整耦光光纖與雷射之間的距離以改變功率，會使線寬頻譜隨功率的
降低而出現拓寬的現象，但耦光光纖後的功率變化對線寬影響不大。論文還比較
了不同結構及波導材質對耦合的影響，最終選定波導高度為 100 nm 的低限制波
導作為外部共振腔的設計。最後，論文將展示如何通過不同方法實現自注入鎖模，
成功將雷射線寬壓縮至原來的五分之一。

摘要(英)

Laser linewidth is one of the key indicators of laser performance, playing a
crucial role in various fields such as optical communication, LiDAR, and optical atomic
clocks. As technology advances, the requirements for laser linewidth have become
increasingly stringent. This thesis proposes a method to reduce laser linewidth using
self-injection locking technology. The method employs a microring resonator as the
external cavity of the laser, achieving mode-locking through energy feedback from
Rayleigh backscattering, further narrowing the laser linewidth. Compared to
commercially available external cavity lasers, this technique is more cost-effective and
highly compatible with complementary metal-oxide-semiconductor (CMOS)
fabrication technology, offering high integration density.
The thesis also introduces the fabrication process of the microring resonator. To
verify the impact of self-injection locking on laser linewidth, the thesis explores
linewidth measurement techniques in detail. Depending on the laser linewidth, it is
necessary to choose an appropriate length of delay fiber and adjust polarization during
measurement to achieve a Lorentzian profile in the spectrum. Additionally, the study
found that adjusting the distance between the coupling fiber and the laser to change the
power causes the linewidth spectrum to broaden as the power decreases, although
changes in power after the coupling fiber have little effect on the linewidth. The thesis
also compares the effects of different structures and waveguide materials on coupling,
ultimately selecting a low-confinement waveguide with a height of 100 nm as the
design for the external resonator. Finally, the thesis demonstrates how self-injection
locking can be achieved through various methods, successfully compressing the laser
linewidth to one-fifth of its original value.

關鍵字(中)

★ 半導體雷射
★ 雷射線寬
★ 微環形共振腔
★ 自注入鎖定

關鍵字(英)

★ Semiconductor laser
★ Laser linewidth
★ Micro-ring resonator
★ Self-injection locking

論文目次

摘要 I
Abstract II
目錄 IV
圖目錄 VII
表目錄 XV
第1章緒論 1
1-1 矽光子 1
1-2 微環形共振腔 1
1-3 雷射原理及特性 3
1-3-1 雷射激發原理 3
1-3-2 雷射基礎架構 5
1-3-3 雷射種類 6
1-4 研究動機 9
1-5 論文概要 12
第2章雷射線寬量測系統及模擬 13
2-1 雷射線寬量測技術及線寬量測架構 13
2-1-1 聲光調製器直流電壓驅動 15
2-1-2 延遲光纖的選擇 18
2-2 自延遲外差式量測法模擬 20
第3章微環形共振腔之製程及量測 24
3-1 製程流程 24
3-1-1 絕緣層之沉積 25
3-1-2 氮化矽波導之薄膜製程 27
3-1-3 黃光微影製程 29
3-1-4 蝕刻製程 32
3-1-5 波導披覆層之沉積 33
3-2 熱調製加熱器之製程 34
3-3 微環形共振腔之量測 39
3-3-1 品質因子之計算 39
3-3-2 穿透頻譜之量測系統 42
3-4 熱調製之量測 43
第4章雷射特性量測及自注入鎖模 45
4-1 雷射特性量測 45
4-1-1 DFB雷射耦光穩定度 45
4-1-2 DFB雷射點針操作 48
4-1-3 雷射L-I曲線及波長穩定度量測 51
4-1-4 光譜儀及電頻譜儀確認 53
4-1-5 極化調整 57
4-1-6 雷射線寬確認 58
4-2 DFB雷射光強度對量測頻譜之影響 59
4-2-1 移動耦光光纖造成功率衰減 59
4-2-2 透過可變衰減器造成功率差 60
4-2-3 DFB雷射和不同元件耦合造成功率差 61
4-2-4 DFB雷射和元件耦合造成功率差 63
4-2-5 在光電轉換器前透過可變衰減器造成功率差 64
4-3 DFB雷射線寬對LiDAR量測之差異 65
4-4 雷射自注入鎖模 67
4-4-1 注入鎖模原理 67
4-4-2 Rayleigh背向散射之量測 69
4-4-3 調整DFB電流達到自注入鎖模之線寬量測 71
4-4-4 透過微加熱器達到自注入鎖模之線寬量測 82
4-4-5 調整DFB工作波長進入共振波長進行線性化 85
4-4-6 透過微環形共振腔微加熱器進行線性化 87
第5章結論與未來展望 90
參考文獻 92

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指導教授

王培勳(Pei-Hsun Wang)

審核日期

2024-10-9

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