Japan Society of Applied Physics;The Japan Society of Applied Physics
摘要:
摘要： This article has shown that the co-sputtering method and post-annealing treatment have successfully fabricated the transparent conductive distributed Bragg reflectors (TCDBR). The transparent conducting film, anatase Nb-doped TiO 2 (TNO), which has a high refractive index can be combined with Al-doped ZnO (AZO) low refractive index transparent conducting films to make a TCDBR capable of transferring the current from electrode to semiconductor while still maintaining the advantage for the micro resonant cavity. The eight-period stack of AZO/TNO achieves a reflectivity of up to 90% centered at 550 nm and a resistivity of $1.88\times 10^{-3}$ $\Omega$ cm. 出版者： The Japan Society of Applied Physics 出版日期： 2012-05-01 出處： Japanese Journal of Applied Physics, 2012-05, Vol.51 (5), p.052602-052602-4 資源來源： Institute of Physics Journals 識別號： ISSN: 0021-4922 識別號： EISSN: 1347-4065 識別號： DOI: 10.1143/JJAP.51.052602
