摘要： Focal plane testing methods such as the Shack-Hartmann wavefront sensor and phase-shifting deflectometry are valuable tools for optical testing. In this study, we propose a novel wavefront slope testing method that uses a scanning galvo laser, in which a single-mode Gaussian beam scans the pupils of the tested optics in the system. In addition, the ray aberration is reconstructed by the four-step phase-shifting measurement by modulating the angular domain. The measured wavefront is verified by a Fizeau interferometer in terms of Zernike polynomials. 其他題名： Appl Opt 出版者： United States 出版日期： 2015-10-01 出處： Applied Optics, 2015-10, Vol.54 (28), p.E235-E240 資源來源： Optica Publishing Group (Optics Infobase) 識別號： ISSN: 1559-128X 識別號： EISSN: 2155-3165 識別號： EISSN: 1539-4522 識別號： DOI: 10.1364/AO.54.00E235 識別號： PMID: 26479659
