Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning

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題名:	Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning
作者:	吳俊緯;Wu, Jim-Wei;Lin, Yi-Ting;Lo, Yu-Ting;Liu, Wei-Chih;Chang, Kuang-Yao;Liu, Da-Wei;Fu, Li-Chen
貢獻者:	資訊電機學院電機工程學系
關鍵詞:	Atomic force microscopy;Atomic force microscopy (AFM);Atomic measurements;Atomic structure;Corners;Distortion;dual probe scan;Force;Force measurement;high-precision scanning;local scan strategy;Mechatronics;Microscopes;Microscopy;Nanostructure;Optical microscopy;probe tilting angle;Probes;Scanning;Surfaces;Wall effects
日期:	2016-10-01
上傳時間:	2026-04-23 13:57:12 (UTC+8)
出版者:	Institute of Electrical and Electronics Engineers Inc.;New York: IEEE
摘要:	摘要： Because of the everlasting promotion of micro/nanofabrication techniques, the measurement of the feature contour of micro/nanofabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been frequently used in measuring of micro/nanofabricated structures. However, most conventional AFM systems use a single probe with a monotonic tilting angle to scan all kinds of sample profiles. This type of AFM design easily suffers from the so-called side wall effect, and the scanning result will induce a distortion phenomenon at the corner part. To solve this problem, a novel dual probe AFM system is proposed in this paper. A highly flexible system structure is adopted in this work to create different tilting angle of each probe. With the method developed for obtaining the appropriate tilting angle, we set up the so-called effective tilting angles under different scanning scenarios. In addition, a useful merging method has been developed to stitch together the scanning results from two different probes out of two different scanning units. For scanning a standard grating, the error of sidewall angle from the scan image decreases from 27.3% to 4.5% when our method is compared with a traditional scan. Finally, by integrating the proposed scan method with a new raster-based local scan strategy, we can achieve a high-throughput precision scan. In the scan of human blood cells, we not only can remove unnecessary scan area up to 61.04%, but also can improve sidewall distortion. A comprehensive series of experiments have been conducted to validate the scanning capability of the proposed methods on our self-developed AFM system. 其他題名： TMECH 出版者： New York: IEEE 出版日期： 2016-10 出處： IEEE, 2016-10, Vol.21 (5), p.2512-2521 資源來源： IEL:IEEE/IEE Electronic Library 版權： Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2016 識別號： ISSN: 1083-4435 識別號： EISSN: 1941-014X 識別號： DOI: 10.1109/TMECH.2016.2577739 識別號： CODEN: IATEFW
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