摘要 狹縫式塗佈技術過去廣泛的使用在各種不同產品的製造，包括膠帶、底片、軟性印刷電路板等方面，近年來由於液晶電視的需求量大增，帶動了國內外各大廠致力於LCD相關零組件的產品研發，其中LCD的彩色濾光片製程就是以狹縫式塗佈(Slot Coating)技術來完成光阻的塗佈，如何能使彩色濾光片的光阻使用量降低且提升其良率，這也是本實驗所研究的重點。為達到光阻減量及良率提升的目標，就必須找出狹縫式塗佈最佳的注液模式，藉由改變各種不同的塗佈參數如：操作參數、模具幾何設計參數及流體參數，以建立完整的塗佈視窗(Coating Window)。在塗佈的過程中，經由塗佈液珠(Coating Bead)的觀測，可以了解整個塗佈過程的行為及機制，而塗佈缺陷發生是判斷塗佈視窗的塗佈上限及塗佈下限的重要依據，本實驗所觀察到的塗佈缺陷有兩種，分別是肋形紋(Rivulet)及水窪(Pool)。在肋形紋及水窪缺陷發生前分別找出塗佈視窗的塗佈上限及下限，並觀察不同塗佈參數改變對塗佈液珠寬度的影響，最後觀察不同流率下輸入不同速度時好膜的缺陷長度。 Abstract Slot coating is a common method in the manufacture of a wide variety of products, including tape, film, soft printing circuit board. Because the demand for the liquid crystal TV is heightened in recent years, every large company is devoted to the research and development of products of the relevant spare parts of LCD. The process of the color filter of LCD is completed by the slot coating. The goal of the research is to reduce to the photoresist and rise the yield rate. In order to reach the reduction of the photo resisting and raise the yield rate, it must find out the best injection model of the slot coating. By changing the variety of different coating parameter such as operate parameter, slot die parameter , and fluid parameter is to set up the intact coating window. We can realize that the whole behavior and mechanism in the coating process by observing the coating bead. The coating defects are the important characteristic to judge the upper and lower limit of the coating window. There are two kinds of coating defects in this experiment involving rivulet and pool. Before the rivulet and pool defects take place, we find out the upper limit and lower limit of the coating window. And observe he effect of the width of the coating bead in different coating parameter. Finally, we observe the fine defect length under the different coating speed and flow rate.
