Effects of ion assistance and substrate temperature on optical characteristics and microstructure of MgF2 films formed by electron-beam evaporation

NCUIR > Research Center > Thin Film Technology Center > journal & Dissertation > Item 987654321/35669

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35669

Title:	Effects of ion assistance and substrate temperature on optical characteristics and microstructure of MgF2 films formed by electron-beam evaporation
Authors:	Cheng-Chung Jaing,Ming-Hua Shiao,Cheng-Chung Lee,Chih-Jung Lu,Ming-Chung Liu,Chin-Han Lee,Hsi-Chao Chen
Contributors:	薄膜技術研究中心
Keywords:	SIO2 THIN-FILMS;VACUUM ULTRAVIOLET;DEPOSITION;TIO2;COATINGS;STRESS;ENERGY
Date:	2006
Issue Date:	2010-07-07 15:47:32 (UTC+8)
Publisher:	中央大學
Abstract:	Magnesium fluoride thin films were prepared by electron-beam evaporation and ion-assisted deposition (IAD). The effects of ion, assistance and substrate temperature during deposition on the optical properties and microstructure were studied. The grain siz
Relation:	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Appears in Collections:	[Thin Film Technology Center] journal & Dissertation

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