以電流控制方式快速製備孔洞間距400至500奈米之陽極氧化鋁模板; Fast fabrication of ordered porous alumina membranes in the 400-500 nm pore interval range by current control method

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题名:	以電流控制方式快速製備孔洞間距400至500奈米之陽極氧化鋁模板;Fast fabrication of ordered porous alumina membranes in the 400-500 nm pore interval range by current control method
作者:	陳智堯;Chen,Chih-yao
贡献者:	材料科學與工程研究所
关键词:	陽極氧化鋁模板;自燃(Burning)現象;規則排列結構;anodic aluminum oxide (AAO) membrane;burning phenomenon;highly ordered structure
日期:	2013-08-29
上传时间:	2013-10-08 15:13:43 (UTC+8)
出版者:	國立中央大學
摘要:	利用奈米模板來製備低維度奈米材料是一種具有潛力的方式，且無需要使用昂貴的顯影製程設備，即可將奈米陣列轉移至基板上，其中，陽極氧化鋁（AAO）膜是最有吸引力製備奈米孔徑的材料，由於其高度有序結構、高孔洞密度和孔徑可調整等特性質，這使得陽極氧化鋁具有相當大的潛力於各式各樣的應用中。在陽極氧化過程中，所施加的電壓與陽極氧化鋁所形成的孔洞間距和孔徑大小成線性關係，在以往的固定電壓方式中，在外加偏壓150?195 V，可製備具有大孔洞間距約為300?500 nm的陽極氧化鋁模板，但當外加的電壓超過180 V時，會發生大量電流集中在缺陷、氧化層較薄弱領域，這將造成氧化層結構遭到破壞，此種狀況稱之為自燃(burning)現象。在本研究中，成功利用控制電流方式避免自燃(burning)現象的發生，在磷酸溶液中製備孔徑可達400 nm至500 nm的陽極氧化鋁模板，從實驗結果中，可將電流提升至6.5 mA，而其成長速率每小時可達6 μｍ以上，完全避免在固定電壓方式下當電壓超過180 V造成的自燃(burning)現象，並在反應時間7 h內其可達大範圍程度有序結構 Nanosize templates are a low-cost and promising approach for deposition of low-dimensional nanomaterials or transfer of nanopatterns onto a substrate without using costly lithography equipments. Among them, anodic aluminum oxide (AAO) membrane is one of the most attractive nanopore materials due to its highly ordered structure, high pore density and tunable pore size, which make them potentially for a variety of applications. The pore size and interpore distance of AAO membranes are linearly dependent on the applied voltage during the anodization process. In the conventional constant voltage method, the AAO membranes with a large interpore spacing of 300~500 nm could be obtained using an anodizing voltage of 150~195 V. When applying a high voltage over 180 V, however, the burning phenomenon, which would cause structural damages, usually appears owing to the high current flows concentrated at the some weak areas. In this study, The AAO membranes were fabricated through an anodization procedure in phosphoric acid (H3PO4) solution. A current-controlled method has been developed for fabrication of AAO membranes with a large pore interval in order to avoid the burning phenomenon. From the experimental results, the average growth rate of AAO membranes could increase up to 6 μm/hr with an applied current density of 6 mA/cm2 and the burning phenomenon could be totally avoided at a relatively high anodizing voltage of 192 V. The effect of current density on the growth rate and burning phenomenon was also investigated.
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