整合填充型水洗技術於潔淨室外氣空調箱 以去除酸鹼氣態分子污染物之研究;Application of Air washer of Make-up Air Units to Remove Acidic and Basic Gaseous Melecular Pollutants

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题名:	整合填充型水洗技術於潔淨室外氣空調箱以去除酸鹼氣態分子污染物之研究;Application of Air washer of Make-up Air Units to Remove Acidic and Basic Gaseous Melecular Pollutants
作者:	徐文瑞;Hsu, Wen-Jui
贡献者:	環境工程研究所在職專班
关键词:	氣態分子污染物;外氣空調箱;空氣洗滌器;洗滌塔填充材;AMC;MAU;Air Washer;packing material
日期:	2017-07-20
上传时间:	2017-10-27 16:22:53 (UTC+8)
出版者:	國立中央大學
摘要:	摘要(中) 在高科技生產廠房，由於製程的進步及晶圓製程線徑的微小化，對於生產環境的需求已從要求粒狀污染物進而要求氣態分子污染物(Airborne Molecular Contaminant, AMC)的濃度標準。對潔淨室外氣空調箱(Make-up Air Unit, MAU)利用空氣洗滌器(Air Washer)加濕方式，同時去除大氣中的氣態分子污染物中二氧化硫(SO2)、氨(NH3)，藉由水對於二氧化硫、氨等氣體為良好的溶劑，進而提升此類污染物的去除效率。目前應用在加濕上使用的空氣洗滌器(Air Washer)大都採用噴淋水洗的方式，將其搭配填充型洗滌塔，便可將加濕器有效運用於去除AMC，所以填充型洗滌塔的填充材料型式，便為影響去除效率的一項重要參數。本研究探討洗滌塔的填充材料分別為立體結構型填充物及SUS304交叉絲網，其於不同的水質條件下，對二氧化硫(SO2)及氨(NH3)的去除效率，實驗發現：SUS304交叉絲網循環水水質控制在30 μS/cm時對於二氧化硫及氨的最高去除效率分別為68%及93%，出口濃度可維持在2 μg/m3以下。將循環水水質控制在10 μS/cm時，對於二氧化硫及氨的最高去除效率可分別提昇至79%及97%。當填充材料為立體結構型填充材料時，其填充層厚度為SUS304交叉絲網的三分之一，即可達到與SUS304交叉絲網相同的去除效率，所以使用立體結構型填充材料，可縮短空氣洗滌器(Air Washer)的建置空間，進而增加生產機台的設置，有效提升企業的的競爭力及獲利。 ;摘要(英) Airborne molecular contamination (AMC) is chemical contamination in the form of vapors or aerosols, that and has a detrimental effect on a product or a process. The main sources of AMC in cleanrooms are the ambient environments, process chemicals, emissions from tools emissions, and construction materials. With the increased production of semiconductor devices in the sub-100 nm range, a Abating AMC has become a crucial element of cleanroom management as the production phase of semiconductor devices marches deep into sub-100-nm range. Make-up air units (MAUs) are air- handling units that provide purified outside air to cleanrooms. An The air washer of in an MAU is a piece of equipment that is designed to remove contamination by scrubbing the outside air that moves through it. Internal packing in the packed a tower of air washers provides a large wetted contact surface area to induce intimate contact between for the contaminated gas and the scrubbing liquid. This study evaluated the removal performance of SO2 and NH3 by in a tower of packing of air washers with that used SUS304 wire netting and structured-interlaced monofilament as internal packing material. It is found The results showed that one third a tower packeding with depth of structured- interlaced monofilament can achieve the same removal performance as a tower packed with SUS304 wire netting, but at one-third the packing depth. This is due to because the packing material of used in the structured-interlaced monofilament could facilitated the breakup of the liquid phase and created the maximum surface area for mass transfer with in the vapor phase. Using structured-interlaced monofilament packing material, would considerably reduce the volume of the air washer could be reduced largely, and thereby actuvate increasing the working space of the factory.
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