利用奈米球微影術製備可撓曲陽極氧化鋁奈米模板之研究

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Title:	利用奈米球微影術製備可撓曲陽極氧化鋁奈米模板之研究
Authors:	郭宗義;Kuo, Tsung-Yi
Contributors:	化學工程與材料工程學系
Keywords:	陽極氧化鋁
Date:	2018-08-23
Issue Date:	2018-08-31 11:34:46 (UTC+8)
Publisher:	國立中央大學
Abstract:	隨著科技進步，近年來電子元件朝輕薄短小的開發導向，當元件薄至一定的奈米尺度後，使它帶有可撓曲性，成為近年來發展的重要目標之一，例如：智慧型手錶、薄型電子顯示器等等。為了增進可撓曲電子元件之性能表現，我們將嘗試結合陽極氧化鋁模板技術製備零維及一維之奈米結構。而製造具大面積規則有序的奈米孔陣列的薄型陽極氧化鋁模板，目前已經開發出多種技術，例如：PMMA模板輔助法、離子束光刻法以及模板奈米壓印法等等。然而由於模板輔助法的步驟繁瑣耗時長、離子光刻法無法製備大面積規則有序的陽極氧化鋁膜板以及製備奈米模板之成本昂貴，使得它們難以有廣泛的應用。在本研究中，我們提出利用低成本且能快速製備的奈米球微影術壓印圖案的方法，並在可撓曲基板上製造薄型陽極氧化鋁模板。我們透過預先壓印出規則有序之凹痕及一步驟陽極氧化處理，成功製備出面積約為1 x 1cm2 之規則有序且準直的薄型陽極氧化鋁膜板。;In recent years, the electronic components have been oriented towards light and thin development with the advancement of science and technology, When the components are thin to a nanoscale, they get with flexibility, which has become one of the important developed goals. We attempt to fabricate zero-dimensional and one-dimensional nanostructures in combination with anodized aluminum template technology in order to enhance the performance of the flexible electronic component. The variety of techniques have been developed for the fabrication of thin anodic aluminum oxide template, such as the PMMA template-based method, the electron beam lithography method, and the nanoimprint template method. However, those methods are difficult to use in a wide range of applications, due to the cumbersome and the time-consuming steps, the inability of ion-lithography to fabricate large-area regular-ordered anodic aluminum oxide and the high cost of preparing nanoimprinted template. In this study, we propose a method of nanosphere lithography and fabricate the thin anodic aluminum oxide template on the flexible substrate. We have successfully prepared regular ordered and collimated thin anodized aluminum oxide template with an area of approximately 1 x 1 cm2 by pre-imprinting and one-step anodizing.
Appears in Collections:	[National Central University Department of Chemical & Materials Engineering] Electronic Thesis & Dissertation

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