| 摘要: | 本研究使用超音波振動輔助與田口法實驗設計針對鋁碳化矽材
料進行表面磨削函工較佳參數研究，探討各種函工參數：液中/非液
中函工(Cutting fluid sinking/non-sinking)、主軸轉速(Spindle speed)、
超音波凾率(Ultrasonic power)、超音波頻率(Ultrasonic frequency)、進
給速率(Feed rate)、切削深度(Cutting depth)等，並針對各種函工特性
如表面粗糙度值與槽深誤差率結果分别進行探討，並採用田口法
L18 直交表，每組參數重覆進行三次實驗，並將品質特性量測之結
果由變異數分析(ANOVA)推算，分別求得各項因子之貢獻度來求得
較佳參數，獲得較優異的表面粗糙度與較小的槽深誤差率，再利用
雷射共軛焦掃描顯微鏡（LSCM），觀察各實驗參數組合函工後之詴
片表面形貌。
實驗結果顯示，超音波振動輔助磨削函工鋁碳化矽材料，可得
到較小之表面粗糙度與槽深深度誤差率，依據實驗結果顯示，於非
液中函工、主軸轉速4000rpm、超音波凾率4W、超音波頻率23KHz、
進給速率150mm/min 及切削深度 0.025mm 之參數組合下，可獲得
較佳之表面粗糙度Ra值0.432μm。另於液中函工、主軸轉速6000rpm、
超音波凾率16W、超音波頻率23KHz、進給速率 150mm/min 及切
削深度0.025mm之參數組合下，可獲得較小之槽深誤差率11.2%。;This study used ultrasonic vibration assistance and Taguchi design of experiments to
obtain better parameters for surface grinding of AlSiC material. It also discussed
various processing parameters, including cutting fluid sinking/non-sinking, spindle
speed, ultrasonic power, ultrasonic frequency, feed rate, and cutting depth, as well as
various processing characteristics such as surface roughness value and slot depth error
rate results were discussed respectively. The Taguchi L18 orthogonal array was used,
each group of parameters was tested three times, and the quality characteristic
measurement results were deduced by ANOVA. The contribution of each factor was
calculated to obtain better parameters. Relatively excellent surface roughness and
smaller slot depth error rate were obtained. Then the surface morphology of the
samples processed with various experimental parameter combinations was observed
using Laser Scanning Confocal Microscopy (LSCM).
The experimental results showed that the ultrasonic vibration-assisted grinding of
AlSiC material could achieve smaller surface roughness and slot depth error rate.
According to the experimental results, in the cutting fluid non-sinking, under the
parameter combination of spindle speed 4000rpm, ultrasonic power 4W, ultrasonic
frequency 23KHz, feed rate 150mm/min and cutting depth 0.025mm, a better surface
roughness Ra value of 0.432μm can be achieved. In addition, in the cutting fluid
sinking, under the parameter combination of spindle speed 6000rpm, ultrasonic power
16W, ultrasonic frequency 23KHz, feed rate 150mm/min and cutting depth 0.025mm,
a smaller slot depth error rate of 11.2% can be achieved. |
