利用雷射與氣體之間的交互作用產生高階諧波是一種製造高相干性極紫外光(Extreme-UV)/ X 光的方法,使用充氣毛細管波導為實驗的靶材是一種常見的高階諧波產生方式,其目的是限制驅動脈衝的發散並延長高階諧波產生的作用長度。此外,使用離子作為交互作用的介質,是突破傳統高階諧波輸出截止光子能量的方法。然而,在高游離態條件下要得到高效率的高階諧波輸出,必須達成相位匹配。本論文就是針對充氣毛細管波導中的相位匹配條件做全面的診斷,包含中性氣體色散、幾何色散、電漿色散,與高階諧波內在偶極矩相位變化,達成高階諧波相位匹配條件的完整了解與控制。我們的研究結果有助於推動更短波長、更高效率的高階諧波產生。;The generation of high-order harmonics through the laser-gas interaction is a method for producing coherent extreme ultraviolet (EUV) / X-rays. Using a gas-filled capillary waveguide as the interaction target is a common approach. The capillary waveguide can suppress the driving laser divergence and thus extend the interaction length. Moreover, utilizing ions as the interaction medium can break through the traditional cutoff photon energy to get a higher-order harmonic output. However, to achieve efficient high-order harmonic generation in a highly ionized medium, phase-matching conditions must be achieved. This thesis provides a comprehensive measurement of the phase-matching conditions in a gas-filled capillary waveguide, taking into account the neutral gas dispersion, geometrical phase shift, plasma dispersion, and the HHG intrinsic dipole phase variation. Our results contribute to the understanding and control of phase matching for high harmonics, advancing the generation of shorter wavelengths and higher efficiency harmonics.