隨著長波紅外熱成像技術在高解析度應用中的需求日益增加，傳統熱影 像光學系統面臨結構複雜、體積龐大及成本高昂等挑戰。感測器解析度的提 升對光學系統提出了更高的要求。特別是大口徑透鏡的設計，對於提高影像 品質及滿足高像素數的需求至關重要。本研究實現了一種基於 Moiré 效應 的公分等級變焦超穎透鏡。此透鏡僅需透過兩片超穎透鏡的相對旋轉即可 實現焦距連續調整，具備結構簡單、操作靈活且不依賴其他光學元件即可成 像的優勢。 在模擬分析中，採用波動傳遞方法研究透鏡間距及對位誤差對光學性能 的影響。結果顯示，精準對位是確保透鏡性能的關鍵，微米級的對位誤差即 可能導致成像品質顯著下降。製程方面，本研究成功將全片矽晶圓製程技術 應用於直徑達 1 公分的超穎透鏡製造，克服了奈微米結構在大面積製程中 的挑戰。在實驗量測中，即使在對位誤差不可完全控制的情況下，仍能拍攝 到不同倍率的影像，並實現1到2.75倍的變焦能力，且在旋轉角度範圍內 具備穩定的光學性能。;As the demand for high-resolution applications in long-wave infrared thermal imaging continues to grow, traditional thermal imaging optical systems face challenges such as structural complexity, large size, and high costs. Improvements in sensor resolution impose higher requirements on optical systems, particularly in designing large-aperture lenses, which are critical for enhancing image quality and meeting the demands of high pixel counts. This study demonstrates a centimeter-scale zoom metalens based on the Moiré effect. This lens achieves continuous focal length adjustment through the relative rotation of two metalenses, featuring a simple structure, flexible operation, and the ability to form images without relying on additional optical components. In the simulation analysis, the wave propagation method was employed to investigate the effects of lens spacing and alignment errors on optical performance. The results indicate that precise alignment is essential to ensure lens performance, as micron-level alignment errors can significantly degrade imaging quality. On the fabrication side, this study successfully applied full-wafer silicon-based manufacturing techniques to produce a metalens with a diameter of 1 centimeter, overcoming the challenges associated with fabricating nanostructures over large areas. In experimental measurements, even under conditions where alignment errors could not be fully controlled, images with varying magnifications were successfully captured. The lens achieved a zoom capability ranging from 1 to 2.75 times, demonstrating stable optical performance across the range of rotation angles.
