基於四波剪切干涉術之光學元件精密加工後波前變異分析;Wavefront Analysis of Optical Components after Precision Fabrication Using Quadriwave Lateral Shearing Interferometry

Please use this identifier to cite or link to this item: https://ir.lib.ncu.edu.tw/handle/987654321/97849

Title:	基於四波剪切干涉術之光學元件精密加工後波前變異分析;Wavefront Analysis of Optical Components after Precision Fabrication Using Quadriwave Lateral Shearing Interferometry
Authors:	陳韋豪;Chen, Wei-Hao
Contributors:	光電科學與工程學系
Keywords:	四波剪切;干涉;精密加工;補償;光程差
Date:	2025-08-21
Issue Date:	2025-10-17 11:59:58 (UTC+8)
Publisher:	國立中央大學
Abstract:	本研究針對光學系統像差補償之需求，提出一套結合四波剪切干涉技術（Quadriwave Lateral Shearing Interferometry, QWLSI）之量測與補償流程。相較於傳統干涉儀，QWLSI 無需參考光即可同步獲取多方向波前梯度資訊，具備緊湊、穩定與抗干擾能力強等優勢。為驗證其於實際補償應用中的可行性，研究設計四階段實驗流程：第一階段藉由比較QWLSI與Fizeau干涉儀之量測結果，以驗證其準確性；第二階段基於QWLSI 結果執行補償玻璃片之加工與修正；第三階段針對玻璃表面微小厚度變化，驗證光程差與相位之對應關係；第四階段則進行單一像差Defocus的補償實作與量化分析。在波前重建方面，採用梯度積分還原相位圖，並運用 Zernike 多項式進行像差分解。實驗結果顯示，在單透鏡 tube lens 與平板玻璃樣品中，QWLSI 與 Fizeau 干涉儀可量測出高度一致的像差趨勢與數值分布，證實其穩定且可重複之量測能力。於補償片加工後，PV 值由0.424λ降至0.295 λ，誤差減少約31%；於局部刮除實驗中，光程差對應的相位變化推算厚度誤差低於6%；Defocus 補償後，PV 值則由 2.198 λ 降至 1.289 λ，降幅達約41%，顯示其實際補償潛力。本研究結果證實，QWLSI可作為一種快速、穩定且高解析度之波前量測工具：不需參考面或觀察干涉條紋，亦可進行完整波前重建與補償分析，展現其相較傳統 Fizeau 干涉法更具彈性與應用潛力的優勢。 ;This study proposes an integrated wavefront measurement and aberration compensation workflow based on Quadriwave Lateral Shearing Interferometry (QWLSI) to address the correction needs of optical systems. Compared to traditional interferometers, QWLSI enables simultaneous acquisition of multi-directional wavefront gradients without requiring a reference beam, offering advantages such as compact configuration, stability, and strong resistance to environmental disturbances. To verify its feasibility for practical compensation applications, a four-stage experimental process was designed: (1) cross-validation of measurement results between QWLSI and a Fizeau interferometer to confirm accuracy; (2) fabrication and correction of a compensation glass plate based on QWLSI data; (3) verification of the correlation between optical path difference (OPD) and phase shift through localized surface thickness variations; and (4) experimental compensation and quantitative analysis of a single aberration mode(Defocus). For wavefront reconstruction, gradient integration was employed to retrieve phase maps, and Zernike polynomials were used to decompose the aberrations. Experimental results show that, for both single-element tube lenses and flat glass samples, QWLSI and the Fizeau interferometer yielded highly consistent aberration distributions and numerical values, validating the stability and repeatability of QWLSI measurements. After compensation glass processing, the peak-to-valley (PV) value decreased from 0.424 λ to 0.295 λ, representing an error reduction of approximately 31%. In the surface-scratch validation experiment, the thickness error inferred from phase–OPD conversion was below 6%. For Defocus compensation, the PV was reduced from 2.198 λ to 1.289 λ, indicating an improvement of about 41% and demonstrating practical compensation feasibility. Overall, the results confirm that QWLSI is a fast, stable, and high-resolution wavefront sensing tool capable of complete wavefront reconstruction and aberration analysis without the need for reference surfaces or fringe visibility. This study demonstrates its superior flexibility and potential over conventional Fizeau interferometry in optical system alignment and compensation tasks.
Appears in Collections:	[Graduate Institute of Optics and Photonics] Electronic Thesis & Dissertation

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