應用於自由空間光通訊的高速及高亮度鋅擴散垂直共振腔面射型雷射陣列;High-brightness and high-speed Zn-diffusion VCSEL Array for free-space optical communication

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Title:	應用於自由空間光通訊的高速及高亮度鋅擴散垂直共振腔面射型雷射陣列;High-brightness and high-speed Zn-diffusion VCSEL Array for free-space optical communication
Authors:	童建瑋;Tung, Jina-Wei
Contributors:	電機工程學系
Keywords:	垂直共振腔面射型雷射陣列;VCSEL Array
Date:	2025-08-05
Issue Date:	2025-10-17 12:49:22 (UTC+8)
Publisher:	國立中央大學
Abstract:	高速且高亮度的垂直共振腔面射型雷射（vertical-cavity surface-emitting laser, VCSEL）陣列，能有效降低自由空間光通訊（Optical Wireless Communication, OWC）通道中接收端的繞射損耗，因此在第六代行動通訊（6G）與衛星通訊系統中扮演關鍵角色。相較於邊射型雷射（edge-emitting laser, EEL），如 DFB 雷射，VCSEL通常具備更強的抗輻射能力。然而，傳統設計用於高功率、高亮度與（準）單模輸出的VCSEL，常面臨高相對強度雜訊（relative intensity noise, RIN）以及空間燒洞現象（spatial hole burning effect, SHB）等問題，這些效應會嚴重限制其在高速數據傳輸中的性能表現。本論文中提出了一種採用新穎環狀鋅擴散（Zn-diffusion）設計與排列緊密的VCSEL 陣列結構，在 850 nm 與 1060 nm 波長下皆可有效克服傳統設計須於單模輸出功率、亮度、RIN 與調變速度之間取捨的瓶頸。與傳統圓形鋅擴散設計的 7×7 850 nm VCSEL 陣列相比，所提出的環狀設計展現出更高的（準）單模輸出功率（160 vs. 145 mW）、更高亮度（73 vs. 65 kW/cm²·sr），以及更寬的-3 dB電光頻寬（22 vs. 17 GHz）。在自由空間傳輸的眼圖量測中，於32 Gbit/s速率下實現無誤碼傳輸且能觀察到清晰的眼圖開口。這些顯著的直流與交流訊號性能表現，歸因於環狀孔徑對於SHB效應的有效抑制。此外，將此環狀孔徑與陣列結構應用至1060 nm VCSEL陣列時，也成功實現了高功率、高亮度與高速傳輸性能，並達成28 Gbit/sec的無誤碼自由空間通訊傳輸。 ;High-speed and high-brightness vertical-cavity surface-emitting laser (VCSEL) arrays, which can effectively minimize the diffraction loss in the receiver side of optical wireless communication (OWC) channel, plays a crucial role in the 6G and satellite communications. Compared with the edge-emitting counterpart, e. g., DFB lasers, VCSELs can usually have the stronger radiation hardness. However, the traditional high-power, high-brightness, and (quasi-) single-mode (SM) VCSEL usually suffers the problems of high relative intensity noise (RIN) and spatial hole burning effect, which seriously limit their performances in high-speed data transmission. In this thesis, Zn-diffusion VCSEL arrays structure with a novel ring-shaped aperture and a compact layout at both 850 and 1060 nm wavelengths are demonstrated to fundamentally overcome the trade-off among the SM output power, brightness, RIN, and modulation speed. Compared with the 7× 7 VCSEL arrays with traditional circular Zn-diffusion aperture at 850 nm wavelength, the new ring-shaped one exhibits higher (quasi-) SM output power (160 vs. 145 mW), higher brightness (73 and 65 KWcm-2sr-1), and a wider 3-dB E-O bandwidth (22 vs. 17 GHz). Clear and error-free 32 Gbit/sec eye-opening over free-space transmission can be measured. These remarkable static/dynamic performances in our array are due to the suppression of spatial hole burning effect in the ring-shaped aperture. Moreover, by implementing the same device structure and layout as those of 850 nm VCSELs array onto 1060 nm ones, similar performances in terms of high-power, high-brightness, and high-speed with error-free 28 Gbit/sec free space transmission have also been successfully demonstrated.
Appears in Collections:	[Graduate Institute of Electrical Engineering] Electronic Thesis & Dissertation

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