| 摘要: | 隨著科技快速發展，光學鏡片技術的革新，現代光學系統對於高精度與高設計自由度之鏡片需求持續提升。相較於傳統球面鏡片，非球面鏡片可有效修正多種像差，並廣泛應用於高性能光學系統中；然而，當鏡片設計進一步朝向進階非球面鏡發展時，其量測與校正難度亦隨之顯著增加。此類鏡片於量測過程中，不同區域對成像面波前之貢獻容易產生耦合，使得傳統量測方法難以兼顧精度與效率。
本實驗室先前研究已成功建立一套適用於非球面鏡片之快速波前量測系統，具備良好的穩定性與重現性。基於此基礎，本研究進一步提出一種以波前檢測技術為核心之量測架構，特別針對進階非球面鏡片於量測過程中所衍生之對位誤差與區域波前混合問題進行改善。為有效區分鏡片不同區域對波前之實際貢獻，本研究引入子孔徑分割量測策略，將鏡片有效孔徑劃分為多個區域，並分別進行波前量測與分析，以降低全孔徑量測時所造成之區域波前耦合效應。
為提升離軸量測精度，本研究進一步針對 Wavefront Sensor 在移動過程中所引入之誤差進行分析與校正，包含 Y 軸位移所造成之角度偏移效應，並透過掃描點光源位置與旋轉座標分析建立補償模型，以提升不同子孔徑量測結果間之一致性與可靠性。
實驗結果顯示，所提出之量測架構結合子孔徑分割量測與離軸校正機制，可有效提升離軸條件下之波前重建準確度，降低系統誤差對量測結果之影響，並具備應用於進階非球面鏡片之區域波前分析與後續子孔徑拼接量測之潛力，為高自由度光學元件之品質評估提供一項可行且可靠的量測方法。
;With the rapid advancement of optical fabrication technologies, modern optical systems have shown an increasing demand for optical components featuring high precision and high design freedom. Compared with conventional spherical surfaces, aspheric lenses are capable of effectively correcting various optical aberrations and are therefore widely employed in high-performance optical systems. However, as optical designs evolve toward advanced aspheric lenses, the complexity of measurement and calibration processes increases significantly. During measurement, wavefront contributions from different regions of such lenses tend to be strongly coupled at the image plane, making it difficult for conventional measurement techniques to simultaneously achieve high accuracy and high efficiency.
In previous studies, our laboratory successfully developed a rapid wavefront measurement system for aspheric lenses, demonstrating good stability and repeatability. Building upon this foundation, the present study proposes a wavefront-based measurement architecture specifically designed to address alignment errors and regional wavefront coupling issues encountered during the measurement of advanced aspheric lenses. To effectively distinguish the individual wavefront contributions from different regions of the lens, a sub-aperture segmentation measurement strategy is introduced, in which the effective aperture of the lens is divided into multiple regions and measured separately. This approach mitigates the regional wavefront coupling inherent in full-aperture measurements.
To further enhance off-axis measurement accuracy, systematic errors introduced during the motion of the Wavefront Sensor are analyzed and compensated, including angular deviations induced by translation along the Y-axis. By scanning the point light source position and applying rotational coordinate analysis, a compensation model is established to improve the consistency and reliability among measurements obtained from different sub-apertures.
Experimental results demonstrate that the proposed measurement architecture, integrating sub-aperture segmentation with off-axis calibration, effectively improves wavefront reconstruction accuracy under off-axis conditions and reduces the influence of system errors on measurement results. Furthermore, the proposed approach exhibits strong potential for regional wavefront analysis and subsequent sub-aperture stitching measurements of advanced aspheric lenses, providing a feasible and reliable solution for the quality evaluation of high–degree-of-freedom optical components. |
