| 摘要: | 硼矽玻璃因其具有硬脆之材料特性，傳統切削加工易導致硼矽玻璃破裂，嚴重影響加工品質，本研究主要係利用梨形碳化鎢電極於超音波振動輔助電化學放電加工硼矽玻璃微孔，實驗中選用碳化鎢棒作為工具電極材料，並透過線放電研磨加工(Wire Electrical Discharge Grinding, WEDG)製備成漸擴且圓弧構造之微梨形工具電極，於硼矽玻璃上進行電化學放電微通孔加工，並深入探討其在不同加工參數下對加工品質特性之影響，加工參數包括有工作電壓、Z軸進給速度、衝擊係數及超音波功率等級，品質特性則包括有表面形貌、入、出口孔徑、微孔錐度、入、出口熱影響區域面積、破片現象、微梨形工具電極之電極損耗等。
實驗結果顯示，採用梨形碳化鎢電極於超音波振動輔助電化學放電加工硼矽玻璃微孔時，導入超音波振動輔助複合微梨形工具電極於電化學放電微孔加工中，確能促進加工區電解液之更新，有助於排除孔內加工碎屑，並薄化絕緣氣膜，進而提升微孔表面形貌與加工精度，而於工作電壓50 V、Z軸進給速度3 μm/sec、衝擊係數70%及超音波功率等級Level 5下，為本研究較佳參數組合，並可得到加工後微孔之入、出口孔徑分別為522.33 μm及519 μm，以及微孔錐度為0.09°，微孔形貌圓整平滑且無破片現象。
;Borosilicate glass, due to its hard and brittle material properties, is prone to breakage during traditional machining, severely affecting the machining quality. This study used pear-shaped tungsten carbide electrodes in ultrasonic vibration-assisted electrochemical discharge machining (ECDM) of borosilicate glass micro-hole. Tungsten carbide rods were selected as the tool electrode material in the experiment, and a diverging and arc-shaped micro-pear-shaped tool electrode was prepared using Wire Electrical Discharge Grinding. Electrochemical discharge micro-through-hole machining was then performed on the borosilicate glass, and the influence of different machining parameters on the machining quality characteristics was investigated in depth. The machining parameters included working voltage, Z-axis feed rate, duty factor, and power of ultrasonic vibration. The quality characteristics included surface morphology, inlet and outlet diameters, micro-hole taper, inlet and outlet heat-affected zone areas, chipping areas, and electrode consumption of the micro pear-shaped tool.
The experimental results show that when using a pear-shaped tungsten carbide electrode in ultrasonic vibration-assisted ECDM of borosilicate glass micro-hole, the introduction of an ultrasonic vibration-assisted composite micro-pear-shaped tool electrode in the electrochemical discharge micro-hole machining process can indeed promote the renewal of the electrolyte in the machining area, helping to remove machining debris from the hole, and thin the insulating gas film, thereby improving the surface morphology and machining accuracy of the micro-hole. The optimal parameter combination in this study consists of working voltage of 50 V, Z-axis feed rate of 3 μm/sec, duty factor of 70%, and power of ultrasonic vibration of Level 5. The inlet and outlet diameters of the processed micro-hole are 522.33 μm and 519 μm, respectively, and the micro-hole taper is 0.09°. The micro-hole morphology is round and smooth without chipping phenomenon. |
