電濕式驅動系統應用於微奈米級圖樣之製作

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洪國騰(Guo-Teng Hong) 查詢紙本館藏

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光電科學與工程學系

論文名稱

電濕式驅動系統應用於微奈米級圖樣之製作
(Fabrication of Micro/Nano patterns with EWOD Actuation)

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摘要(中)

奈米科技的發展將是二十一世紀的主流技術，其中微奈米圖案成像技術，亦將隨著各種功能元件的需求而朝更快速發展。微製造技術難度與日俱增，其中關鍵就是光學微影方法中，由於光繞射的現象而不易得到奈米級解析度圖形，同時大部分光學微影方法之奈米圖案成像技術的光源設備均極為昂貴。因此一個具高解析度之奈米級尺寸，又具有方便且不會昂貴的製程，為半導體製程未來重要技術。因此本論文提出以電濕式 (electrowetting on dielectric, EWOD) 驅動系統與奈米球微影術 (Nanosphere Lithography, NSL) 相結合，並運用軟蝕刻微影 (Soft Lithography) 與自組裝分子膜 (Self-Assembled Monolayer, SAM) 兩種方式，製作出微奈米級之圖樣。

摘要(英)

Nanotechnology has become as the mainstream technology in the twenty-first century. Especially, the micro/nano patterning technology is also under rapid development to the needs of the various functional elements. However, the micro-fabrication technology, which is critical lithography for pattern transferring, is getting more difficult. In optic lithography, the diffraction makes it not easy to obtain the patterns with the fine structures in the nanometer scale. Moreover, the light sources for optical lithography are extremely expensive. Therefore, it is an urgent and interesting subject to develop a new process of high resolution in micro/nano-scale but convenient to implement and not expensive in cost. In this thesis, it is proposed to integrate the electrowetting on dielectric (EWOD) actuation and the nanosphere lithography (NSL). Finally, the application of practical fabrication has also been demonstrated with aids of the soft lithography and the self-assembled monolayer (SAM).

關鍵字(中)

★ 自組裝分子膜
★ 電濕式
★ 奈米球微影術
★ 軟蝕刻微影

關鍵字(英)

★ EWOD
★ NSL
★ Soft Lithography
★ SAM

論文目次

中文摘要........................iv
英文摘要.........................v
誌謝............................vi
目錄...........................vii
圖目錄..........................ix
表目錄.........................xii
第一章緒論......................1
1.1前言......................1
1.2微奈米級圖案轉換技術......3
1.3研究動機..................8
第二章原理......................9
2.1電濕潤....................9
2.2奈米小球.................19
第三章晶片設計與製作...........24
3.1 EWOD晶片設計............24
3.1 EWOD晶片上層電極板製作..25
3.2 EWOD晶片下層基板製作....29
第四章實驗結果與分析...........30
4.1 EWOD微流體系統整合......30
4.2 實驗架構................30
4.3 實驗流程................33
4.4 微奈米級圖樣製作........50
第五章結論與未來展望...........57
參考文獻........................59

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指導教授

楊宗勳(Tsung-Hsun Yang)

審核日期

2010-7-5

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