數位式微流道檢驗晶片之製作與校正分析

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姓名

蔡柏昇(Bo-Sheng Cai) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

數位式微流道檢驗晶片之製作與校正分析
(Fabrication and Calibration in Digital Microfluidic System for Microchip Sensors)

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★ 光學式生化反應即時偵測系統	★ 微液滴驅動之研究與探討

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摘要(中)

在一般生化反應中，對樣品的分析通常包含三個典型步驟，即樣品分離處理、生物化學反應、結果檢測與分析。但此過程之程序不僅耗時且耗成本。因此本實驗提出將EWOD微流體系統做為驅動元件，感測元件則是選用波導共振方式檢測之光學元件，將兩元件整合為數位式微流道檢驗晶片，並透過電腦之控制進而使驅動與偵測能同步即時進行，並於感測元件部分設計兩個偵測點，用以進行同時多點偵測和訊號比對，使實驗量測之反應訊號更加準確。

摘要(英)

As analyzing the general biochemical reactions, there are three essential processes for the diagnostics, which are sample preparation, reaction, and detection. In the conventional process, it is too much time-consuming and expensive in cost. In this study, an integrated microchip has been implemented for the improvement. With the integrated microchip, it has demonstrated the combination between the effectively actuating module and the sensitively sensing module such that the whole biochemical reaction can be diagnosed very quickly and spending small amount of samples as possible. Finally, the sensitivity of the microchip sensors has been explored.

關鍵字(中)

★ 微機電系統技術
★ 波導共振式感測元件
★ 介電質電濕式驅動元件

關鍵字(英)

★ MEMS
★ GMR
★ EWOD

論文目次

中文摘要 --------------------------------------------------------------------------------- iv
英文摘要 ---------------------------------------------------------------------------------- v
第一章緒論 ------------------------------------------------------------------------------ 1
1-1 生物晶片 --------------------------------------------------------------------------------------- 1
1-1-1 微陣列晶片 --------------------------------------------------------------------------- 2
1-1-2 實驗室晶片 --------------------------------------------------------------------------- 4
1-1-3 數位微流體系統 --------------------------------------------------------------------- 6
1-2 生物感測器 ------------------------------------------------------------------------------------ 9
1-2-1 螢光共振能量轉換 ----------------------------------------------------------------- 10
1-2-2 表面電漿共振 ----------------------------------------------------------------------- 11
1-2-3 干涉式生物感射器 ----------------------------------------------------------------- 12
1-2-4 波導共振 ----------------------------------------------------------------------------- 13
1-3 研究動機 -------------------------------------------------------------------------------------- 13
第二章原理 ------------------------------------------------------------------------- 15
2-1 電濕潤原理 ----------------------------------------------------------------------------------- 15
2-1-1 介電質電濕式 ----------------------------------------------------------------------- 16
2-1-2 介電質電濕式液滴控制 ----------------------------------------------------------- 20
2-2 波導共振原理 -------------------------------------------------------------------------------- 23
第三章元件設計與製作 ---------------------------------------------------------- 25
3-1 EWOD晶片設計 ---------------------------------------------------------------------------- 25
3-1-1 EWOD晶片製作流程 ------------------------------------------------------------- 28
3-2 GMR 元件設計------------------------------------------------------------------------------ 32
3-2-1 GMR 元件製作 --------------------------------------------------------------------- 35
3-3 數位微流體系統整合 ----------------------------------------------------------------------- 45
3-3-1 數位微流體系統整合 -------------------------------------------------------------- 45
3-3-2 EWOD微流體系統控制 ---------------------------------------------------------- 46
3-3-3 EWOD晶片驅動測詴 ------------------------------------------------------------- 48
3-3-4 GMR訊號量測系統 --------------------------------------------------------------- 58
第四章整合晶片測詴 ------------------------------------------------------------- 64
4-1 蔗糖水溶液混合偵測實驗 ----------------------------------------------------------------- 64
4-2 量測結果 -------------------------------------------------------------------------------------- 66
第五章靈敏度分析 ---------------------------------------------------------------- 70
5-1 基板與各介面間之干涉現象 -------------------------------------------------------------- 70
5-2 訊號疊加之穿透光譜 ----------------------------------------------------------------------- 71
5-3 整合晶片之干涉現象 ----------------------------------------------------------------------- 73
5-4 EWOD晶片之干涉現象 ------------------------------------------------------------------- 75
5-5 透過頻譜分析進行訊號處理 -------------------------------------------------------------- 76
第六章結論 ------------------------------------------------------------------------- 83
參考文獻 -------------------------------------------------------------------------------- 85

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指導教授

楊宗勳(Tsung-Hsun Yang)

審核日期

2011-8-23

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