| dc.description.abstract | The acidic and alkaline gases, as well as the flammable gases （such as SIH4, HF, and etc.） are often used in the semi-conductor processes. These dangerous gases generated large amount of exhaust gases after going through the process steps, which must be treated with local scrubber, so as to improve the hazardous substances and characteristics, reduce the pollutants discharged to the environment, and relieve the impact on the air quality. The semi-conductor plants are mostly in 24-hour operation. To keep the local scrubber work normally and continuously, the plants entrust the on-site manufacturer’s operation personnel perform maintenance periodically. However, the maintenance schedule and time vary with the equipment types and structural difference. To guarantee the maintenance operation follow the schedule, it often results in uneven operation hours due to the traditional manpower assignment. The operation hours will show larger gap in long terms, and it will lead to the voice of the unfairness among the employees. Therefore, it is an important issue for the managers to dispatch and assign manpower appropriately under the condition of the existing machines in the plant.
By taking a semi-conductor company located in Hsinchu Science Park as an example, the study works out various parameters for the existing local scrubbers in the plant, maintenance schedule and operating manufacturer number, and attendance model. It constructs a mathematic optimization model by using 0-1 integer programming method, and calculates the solution for the most even operation hours and manpower optimization results of the local scrubber maintenance personnel by using the LINGO9.0 software package. After the analysis and comparison in the study, it shows this model improves 79% than the traditional manpower assignment in terms of the assignment schedule fairness, and increases 99.2% in terms of the schedule time efficiency. It can provide reference for the semi-conductor companies in the practice of assigning manpower for the local scrubber maintenance. | en_US |