dc.description.abstract | The purpose of this thesis is proposing a design method for a UV-LED light source system. The primary steps of this design method are as follows: (1) modeling the irradiance distribution of a single light source on the optical field, (2) establishing a light spread function(LSF) algorithm of multi-light source system, (3) optimizing the source-to-source spacing by the secondary derivative method, (4) establishing an algorithm by the mirror virtual light source method, (5) inputing the algorithm calculation result to the optical simulation software for optimal design.
First, we model the irradiance distribution of a single light source on the optical field by using the nonlinear least squares method and establish a LSF algorithm, which can calculate the irradiance distribution of the multi-light source system, optimizing the irradiance distribution of optical field. Next, the UV-LED collimated exposure machine with the light source arranged in sphere packing are optimized designed by the LSF method and use the the secondary derivative method to quickly calculate the source-to-source spacing of the better illuminance uniformity of irradiance in different positions of the optical field. After that, in order to increase the usable area size of collimated exposure machine, this study utilizes light from the edge of the multi-light source array to promote the lower irradiance position, and optimizes the position of the light source and uses the reflective element to establish an algorithm by the mirror virtual light source method. Finally, the preferred relative position of the light source and the reflective element are input to the optical simulation software for optimal design.
According to the design results, this study successfully designed a UV-LED collimated exposure machine with DSR = 10, source-to-source spacing d=31.2mm, target area uniformity of irradiance of 92%, target area x direction width 102mm, y direction width 114 mm, and a scanning exposure machine with a target area of x direction width of 117 mm. This result proves the feasibility of applying the technology to UV-LED light source systems, and provides a precise design method which enables designers to quickly choose sources and reflective element positions according to the requirements.
| en_US |