dc.description.abstract | In response to the diversification and short life cycle of new technology products, the relationship with supply chain cooperation has evolved to “strategic supply management” mode. The advantages of strategic corporate competition depend on part of competition and management in supply chain, choosing the appropriate supplier is the most important part of supply chain management. The selection of the right suppliers will further enhance the
competitiveness and customer satisfaction of the products.
As the technologies in the semiconductor industry continue to improve, the requirements for process equipment systems become more and more complicated. In addition, the market demand continues to increase and expand. With the expansion of the market for semiconductor process equipment, the equipment vendors purchase amount of parts will also grow in Taiwan. In all wafer processing equipment, dry etching equipment used majority
consumption parts in chamber.
The consumable parts performance has a decisive influence, which in turn has a significant contribution to the process yield of the customer′s product. At present, to establish consumable parts supply chain is according to customer’s policy and demand in local. Therefore, the establishment of the consumable parts supplier and the selection result will inevitably affect the supply to the customer.
Supplier selection is a multi-criteria decision making problem (Multiple Criteria Decision Making), In this paper, we will study decision-making laboratory analysis DEMATEL (Decision Making Trial and Evaluation Laboratory) to discuss the correlation and causal relationship between the selected facets and the criteria for the supplier of semiconductor process equipment in Taiwan, Then use the ANP (Analytic Network Process)
to get the relative weight of every facet and criterion. | en_US |