DC 欄位 值 語言 DC.contributor 光機電工程研究所在職專班 zh_TW DC.creator 鍾瀞儀 zh_TW DC.creator Ching-Yi Chuang en_US dc.date.accessioned 2024-11-22T07:39:07Z dc.date.available 2024-11-22T07:39:07Z dc.date.issued 2024 dc.identifier.uri http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=108256016 dc.contributor.department 光機電工程研究所在職專班 zh_TW DC.description 國立中央大學 zh_TW DC.description National Central University en_US dc.description.abstract 本篇論文研究是關於光學薄膜的設計，在1930年代，真空蒸鍍設備出現後，光學薄膜才真正的開始發展，之後因軍事發展所需，更加快了光學薄膜的進步速度，進步至今，光學薄膜的應用已極為廣泛，從我們最常接觸到的民生用品，再到光學通訊、半導體產業、太空科技的應用…等。 伴隨著積體電路(IC)及半導體產業的蓬勃發展，人們對光學薄膜的需求及品質的要求也不斷提高，追求的是厚度越來越薄且體積越來越小，功能卻需更強大的濾光片，濾光片主要用途為選擇可透射的波長，使其通過，限制不可透射的波長，使其截止，利用多層膜的疊加做到濾光的效果。本篇論文是選用二氧化矽作為低折射率材料，再搭配五氧化二鉭、二氧化鈦、氫化矽及鍺，這四種具有不同材料特性的高折射率材料，並使用兩種設計方法，一種為長波通濾光片、短波通濾光片的合併設計，另一種為帶通濾光片，針對選用材料的區別、設計方式的差別、優化層數的不同，可做出表現各不相同的帶通濾光片，進而選用較符合需求的帶通濾光片。 zh_TW dc.description.abstract This paper examines the design of optical thin films.In the 1930s,as the development of vacuum deposition equipment,the development of optical thin films truly began.After this,due to the requirements of military demands,the progress of optical thin films has been accelerated even further.Over decades of continuous innovation,the applications of optical thin films have become extremely extensive.From everyday consumer products,to the applications of optical communication,semiconductor industry,space technology,and so on... With the rapid development of integrated circuits (IC) and the semiconductor industry,demand for optical thin films and the requirements for quality are continuously increasing.There is a requirement for thinner films and smaller dimensions of powerful filters.The primary function of a filter is to allow selected wavelengths to be transmitted.While blocking other wavelengths, achieving the filtering effect through the deposition of multiple layers of film.In this study,silicon dioxide is used as the low refractive index material,combined with tantalum pentoxide,titanium dioxide,hydrogenated silicon,and germanium,as high refractive index materials.Two design methods are applied,one is the combined design of long wave pass filter and short wave pass filter, the other is the bandpass filter design.Based on the differences in material selection,design methods,and optimization of layer numbers,bandpass filters with different performances can be produced to achieve the better performance requirement. en_US DC.subject 光學薄膜 zh_TW DC.subject 厚度 zh_TW DC.subject 多層膜 zh_TW DC.subject 長波通濾光片 zh_TW DC.subject 短波通濾光片 zh_TW DC.subject 帶通濾光片 zh_TW DC.subject 五氧化二鉭 zh_TW DC.subject 二氧化鈦 zh_TW DC.subject 氫化矽 zh_TW DC.subject 鍺 zh_TW DC.subject Optical film en_US DC.subject Thickness en_US DC.subject Multilayer film en_US DC.subject Long wave pass filter en_US DC.subject Short wave pass filter en_US DC.subject Band pass filter en_US DC.subject Ta2O5 en_US DC.subject TiO2 en_US DC.subject SiH en_US DC.subject Ge en_US DC.title 光學薄膜折射率與帶通濾光片薄膜厚度之研究 zh_TW dc.language.iso zh-TW zh-TW DC.title Research on the Refractive Index of Optical Thin Films and the Film Thickness of Bandpass Filters en_US DC.type 博碩士論文 zh_TW DC.type thesis en_US DC.publisher National Central University en_US