| dc.description.abstract | In this era of increased demand for sensors, CMOS sensors have been continuously striving for pixel miniaturization. However, the downsizing of pixels brings inefficiency and the associated low sensitivity issues. Traditional color filter solutions are limited by their inherent structures, exacerbating these problems. In recent years, metasurface color routers have gained significant attention as they can efficiently route specific wavelength light to corresponding pixels, thereby improving efficiency. This approach effectively overcomes the challenges of efficiency and sensitivity. However, incorporating numerous nanoscale structures into tiny pixels poses fabrication challenges.
In this paper, we propose a metasurface color router based on an all-dielectric nanostructure arranged in a periodic pattern. We only place four nanocylinders corresponding to pixels in a 1.6 µm * 1.6 µm unit cell. We employ a genetic algorithm to optimize the structural parameters. In our two designed schemes, the simulated RGB efficiencies achieve 57.16%, 46.88%, 49.94% and 58.47%, 52.98%, 32.77%, respectively. Furthermore, the majority of the energy is concentrated at the centers of each color pixel, mitigating the issue of light falling into low photosensitive areas. In terms of the manufacturing process, there is a possibility to utilize a Krf scanner exposure machine to achieve low-cost mass production of the final structure. | en_US |