| dc.description.abstract | In recent years, the COVID-19 pandemic has significantly changed human lifestyles, reducing direct contact between people but increasing the requirement to exchange information through video display devices. The great attention of smart and self-driving cars has also increased the demand of displays for automobiles. So far, due to its maturity and low cost, a-Si TFT LCD has been the most common display technology. However, the low carrier mobility of a-Si cannot meet the requirement of high-end display applications. As a result, researchers are actively exploring alternative materials, Among the various emerging materials, IGZO has demonstrated the best performance of its high carrier mobility, low leakage current, high uniformity, and low-temperature processability.
In this research, the IGZO thin films deposited by pulsed magnetron sputtering are shown in the first part. The results show that by varying the time of UV irradiation on the substrate and the oxygen flux through the thin films, high quality thin films with low surface roughness and high carrier concentration can be achieved by using Hall, XRD, and AFM measurements. In the second part of the research, the high quality sputtered film is fabricated into thin film transistors using a lithography process. Adjusting the oxygen flux, the thickness of the channel layer, and the channel layer into two layers, the optimal carrier mobility and on/off ratio of the device has been achieved. | en_US |