| dc.description.abstract | Interferometers play an indispensable role in measuring optical components,
particularly in assessing surface flatness. Today, many large optical components
are utilized in industries such as defense and astronomy, making sub-aperture
interferometry a rising trend. If detection technology can be improved, it will pave
the way for new advancements in the manufacturing process of optical
components.
Compared to the traditional method of using Transmission Spheres for curved
surface measurement, this study introduces a novel approach by utilizing a
Transmission Flat within the interferometer setup to measure spherical samples.
By dividing the sample into multiple sub-apertures for stitching, this method
minimizes aberrations introduced during the capture of interference fringes and
overcomes limitations in the measurement range.
This paper will extend from the foundational theories of the five-step phase
shifting interferometry and sub-aperture stitching interferometry to the execution
of subsequent experiments.
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To ensure the accuracy of the experimental measurements, phase simulations
will be incorporated into the algorithm for analysis and discussion before actual
measurements. According to the experimental results, the current measurable
range reaches up to 70% of the total area. In flat surface measurements, the root
mean square error achieves 0.0139 waves, while the curvature radius error for
spherical samples reaches approximately 2%. The system is capable of measuring
samples up to a limit of ±833mm, verifying the feasibility of this experiment.
In summary, this experimental setup replaces the Transmission Spheres with
Transmission Flats, effectively reducing the cost of acquiring standard mirrors
while also lowering the expertise required for operators. Although the method
introduces an innovative approach to optical detection, there is still room for
improvement in terms of error correction and measurement range. | en_US |