| dc.description.abstract | This study successfully fabricated vertically aligned silicon nanowire structures with high aspect ratios and large areas on N-type (001) silicon substrates using a two-step met-al-assisted chemical etching method. The trend and mechanism of electricity generation from water evaporation were verified using deionized water. Furthermore, porous silicon nanowire structures were fabricated using an acidic lateral etching method. Compared to silicon nanowire structures, the porous silicon nanowire structures exhibited superior spe-cific surface area properties. The measurement results of electricity generation from water evaporation demonstrated that these structures significantly enhanced the performance of water evaporation power generation devices. Additionally, by employing an electroless plating technique, silver nanoparticles were uniformly coated in a network form on the porous silicon nanowire structures. The networked silver nanoparticle electrodes exhibited excellent charge collection capabilities. The water evaporation power generation device with silver nanoparticle-coated porous silicon nanowire structures was measured for output voltage and current in a general environment. Finally, the optimized process conditions were directly combined with the thinned silicon substrate.
This study also successfully fabricated uniformly thinned silicon substrates using a one-step metal-assisted chemical etching method. Using the aforementioned optimized process conditions, flexible silver nanoparticle-coated porous silicon nanowire structures were prepared, demonstrating excellent flexibility. These structures can be applied to wa-ter evaporation power generation under various bending conditions.
To address the issue of continuous water supply, this study successfully fabricated silicon micro-pore structures on the back of uniformly thinned silicon substrates using a multi-step metal-assisted chemical etching method. On the front side, the optimized pro-cess technology for fabricating silver nanoparticle-coated porous silicon nanowires was applied, resulting in flexible silver nanoparticle-coated porous silicon nanowire/silicon micro-pore heterogeneous structures. These structures can transport liquid from bottom to top, eliminating the need for intermittent water replenishment. By placing the structure on a liquid surface containing water, capillary action can draw water into the experimental structure, enabling long-term power generation and optimizing the performance of water evaporation power generation devices. | en_US |