| dc.description.abstract | This study investigates the implementation of preventive maintenance (PM) operations for magnetron sputtering systems. Periodic preventive maintenance is one of the most effective methods to improve particulate contamination in products, with a particular focus on the sandblasting process. Sandblasting involves forcibly projecting abrasive material onto the surface of a workpiece under high pressure to clean or alter its surface morphology. Requirements such as high production efficiency, low consumption, high recyclability, and low emissions are considered essential characteristics for sandblasting abrasives. Aluminum oxide has been evaluated as a feasible alternative. The study also explores the effects of sandblasting pressure and abrasive particle size on surface roughness. Experimental results indicate that when the sandblasting pressure is 20 psi and the abrasive particle size is #36 using white aluminum oxide abrasive (Experimental Group #2), there is a significant improvement in surface roughness. This combination extends the preventive maintenance frequency from 7 to 10 times while maintaining a product appearance yield rate greater than 75%. In terms of economic benefits, the substitution with aluminum oxide abrasive can reduce procurement costs by 58%, waste disposal costs by 77%, and greenhouse gas emissions by 30%. While silicon carbide abrasive currently remains the preferred choice in many applications due to its high hardness (9.5 Mohs), thermal conductivity, and chemical stability, issues such as high free silica content during use and waste recovery problems cannot be ignored. Current regulations require disposal of these wastes as general waste through landfill, which incurs high processing costs. Additionally, due to a lack of legal landfill sites, unscrupulous operators engage in illegal dumping and burial, causing severe damage to the natural environment and living spaces. Therefore, this study aims to evaluate the advantages of aluminum oxide abrasives in terms of worker safety, waste recyclability, and economic benefits, while also proposing solutions to existing problems.
Keywords : Particles, Sandblasting, Sputtering, Aluminum Oxide, Preventive Maintenance | en_US |