| dc.description.abstract | Since Taiwan has a complete semiconductor supply chain and has excellent performance in technology, product development and patents, the semiconductor industry plays an indispensable role for Taiwan. With the advancement of semiconductor process technology, product specifications have gradually shrunk, resulting in a significant increase in energy demand for production equipment, and the emitted process gases such as PFCs, HFCs, NF3 and N2O have high global warming potential, thereby causing greenhouse gas emissions. Emissions are gradually increasing, making global warming increasingly serious. In order to respond to the international net-zero emission trend, the semiconductor industry must face up to its carbon emission issues and comply with emission standards stipulated in environmental regulations.
This study will take a semiconductor manufacturing plant as the research object. It will simultaneously install exhaust gas destruction treatment equipment (Local Scrubber, LS) during the construction of thin film, etching and diffusion machines, and compare whether the equipment can significantly reduce greenhouse gas emissions before and after installation. At the same time, the benefits obtained are greater than the total cost of installing the equipment and the cost of direct greenhouse gas emissions caused by not installing the equipment. The results of this study show that greenhouse gas emissions are significantly reduced by installing LS equipment. In addition, data analysis shows that LS equipment can effectively reduce emissions of high global warming potential gases such as PFCs, HFCs, NF3 and N2O, proving that installing LS equipment has significant economic benefits. | en_US |