| DC 欄位 |
值 |
語言 |
| DC.contributor | 物理學系 | zh_TW |
| DC.creator | 李明洪 | zh_TW |
| DC.creator | Ming-Hung Lee | en_US |
| dc.date.accessioned | 2002-7-11T07:39:07Z | |
| dc.date.available | 2002-7-11T07:39:07Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=88222014 | |
| dc.contributor.department | 物理學系 | zh_TW |
| DC.description | 國立中央大學 | zh_TW |
| DC.description | National Central University | en_US |
| dc.description.abstract | 摘 要
近年來，微光機電領域發展蓬勃，成為相當熱門的領域。本論文以灰階光罩技術製作繞射式光學元件，以熱熔融方式製作折射式光學元件。以藍光雷射(405nm)量測微透鏡光學性質。此光學元件可應用於光碟機讀寫頭上的物鏡。
論文主要在於說明微透鏡的設計、製作與光學量測。繞射式光學元件設計，採光程差理論﹔以微影製程、灰階光罩技術與感應式耦合電漿蝕刻製作元件﹔並量測其光學性質，如聚焦在焦平面的斑點、焦距與數值孔徑。折射式光學元件設計，採造鏡者理論﹔以微影製程、熱熔融技術與感應式耦合電漿蝕刻製作元件﹔並量測其光學性質，如聚焦在焦平面的斑點、焦距與數值孔徑。光學量測則是將雷射光束通過微透鏡聚焦在CCD上，擷取影像，分析其斑點尺寸大小。量測結果如下：
NA=0.01, aperture=3.6mm, focal length=145mm, spot size=16.3μm
NA=0.05,aperture=1mm, focal length=0.95mm, spot size=4.3μm. | zh_TW |
| dc.description.abstract | Abstract
Plano-convex diffractive microlenses were fabricated in GaN-based materials with a gray-level mask for the first time. The surface relief of the gray-level diffractive microlens on photoresist was transferred onto GaN by inductively coupled plasma etching technique. The microlenses were characterized with a blue laser diode emitting at 405nm. The focal length of the GaN diffractive microlens is 14.5cm. The potential of the realization of the high-numerical-aperture diffractive microlens in GaN with gray-level mask is discussed. | en_US |
| DC.subject | 灰階光罩聚焦斑點 | zh_TW |
| DC.subject | 氮化鎵 | zh_TW |
| DC.subject | 微透鏡 | zh_TW |
| DC.subject | 數值孔徑 | zh_TW |
| DC.subject | 繞射式光學元件 | zh_TW |
| DC.subject | 折射式光學元件 | zh_TW |
| DC.subject | numerical aperture | en_US |
| DC.subject | diffractive optical elements | en_US |
| DC.subject | High-NA | en_US |
| DC.subject | GaN | en_US |
| DC.subject | microlens | en_US |
| DC.subject | DOE’’s | en_US |
| DC.subject | gray-level mask | en_US |
| DC.subject | spot size | en_US |
| DC.subject | refractive optical elements | en_US |
| DC.subject | ROE’’s | en_US |
| DC.title | 氮化鎵高數值孔徑微透鏡之設計、製作與特性分析 | zh_TW |
| dc.language.iso | zh-TW | zh-TW |
| DC.title | Design, fabrication and testing ofhigh-numerical-aperture GaN microlens | en_US |
| DC.type | 博碩士論文 | zh_TW |
| DC.type | thesis | en_US |
| DC.publisher | National Central University | en_US |