博碩士論文 90246005 完整後設資料紀錄

DC 欄位 語言
DC.contributor光電科學與工程學系zh_TW
DC.creator陳景宜zh_TW
DC.creatorJingyi Chenen_US
dc.date.accessioned2009-7-10T07:39:07Z
dc.date.available2009-7-10T07:39:07Z
dc.date.issued2009
dc.identifier.urihttp://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=90246005
dc.contributor.department光電科學與工程學系zh_TW
DC.description國立中央大學zh_TW
DC.descriptionNational Central Universityen_US
dc.description.abstract本論文設計並展示了一個嶄新的二維透鏡掃描系統,以作為光學同調斷層術的內視鏡頭之用。基本上初始版本的掃描系統包含三個主要部份:橫向運動驅動器,縱向運動驅動器與收光耦合光纖。利用微機電製程技術,我們在SOI基板上製作梳狀結構作為驅動器的基本設計。之後,我們將兩顆相同的非球面玻璃透鏡置放於驅動器的框架上成為掃描透鏡組,以作為日後光學同調斷層術所需的循序掃描功能。在位移正負50 um的範圍內,掃描角度最大可達5度。而聚光光點最小可以達1.6 um,整個循序掃描的面積為150 um x 150 um。由此可得知,此系統具備相當良好的光學及機械特性。在未來可以廣泛應用於前視型光學同調斷層術之內視鏡頭。 zh_TW
dc.description.abstractIn this thesis, a new two-axis lens scanning system as an optical coherence tomography endoscope is presented. Basically, the system consisted of three main parts in initial design: a lateral motion actuator, a vertical motion actuator and a collimator fiber. By using MEMS technology, the comb fingers structure on SOI wafer was took as a basic actuator. Then two same aspherical glass lenses were mounted on each frame of actuators as a pair for raster scanning in optical coherence tomography based endoscopic imaging. The maximum scanning angle is ± 5° at the lens displacement of ± 50 μm and the minimum beam spot size is 1.6 μm. The size of raster scanned image is 150 μm x 150 μm. The scanning characterization as well as the optical and mechanical designs of MEMS scanners is included. This new two-axis MEMS lens scanner is very functional for developing forward OCT imaging system capable of fitting in an endoscopic capsule. en_US
DC.subject光學同調斷層影像zh_TW
DC.subject內視鏡zh_TW
DC.subject微機電zh_TW
DC.subject掃描探針zh_TW
DC.subjectEndoscopeen_US
DC.subjectMEMSen_US
DC.subjectScen_US
DC.subjectOCTen_US
DC.subjectOptical Coherence Tomographyen_US
DC.title設計、製作與量測具二維掃描功能之微機電內視鏡頭zh_TW
dc.language.isozh-TWzh-TW
DC.titleDesign, Fabrication and Testing of a Two-axis MEMS Scanner of OCT Endoscopeen_US
DC.type博碩士論文zh_TW
DC.typethesisen_US
DC.publisherNational Central Universityen_US

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