DC 欄位 |
值 |
語言 |
DC.contributor | 光電科學與工程學系 | zh_TW |
DC.creator | 楊宇智 | zh_TW |
DC.creator | Ue-Zhi Yang | en_US |
dc.date.accessioned | 2005-5-8T07:39:07Z | |
dc.date.available | 2005-5-8T07:39:07Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=91226007 | |
dc.contributor.department | 光電科學與工程學系 | zh_TW |
DC.description | 國立中央大學 | zh_TW |
DC.description | National Central University | en_US |
dc.description.abstract | 本文實驗在研究碳離子佈值於氮化鎵/氮化銦鎵多重量子井發光二極體之特性研究,以30keV、55keV、130keV 不同能量佈植,形成5×1016,5×1018 cm-3不同佈植濃度,佈植在氮化鎵/氮化銦鎵多重量子井發光二極體上濃度為5×1017cm-3 之P型氮化鎵,藉以形成碳離子佈植後的黃光發射特性,進而達成藍黃雙光渾成之白光發光二極體之製作技術開發。
光特性方面,利用光激發光譜(photoluminescence)的量測顯示,隨著碳離子佈植濃度的大於p型氮化鎵摻雜鎂的濃度時,本身p型氮化鎵的藍光發光機制(2.8eV)減弱,並開始有黃光放射的發光機制生成,而配合適合熱處理的修復,得到1050oc為最佳黃光放射修復溫度。
在電性方面, 根據霍爾效應特性量測(Hall effect
measurement)顯示,佈植的碳離子濃度一旦大於p型氮化鎵的電洞濃度10倍以上,試片轉變為n 型的氮化鎵。
發光二極體製作方面,由於P型氮化鎵被佈植區域因離子轟擊所造成損害及高濃度佈植轉變為n型之考量,本文採用網狀方格佈植結構的P型電極設計製作碳離子佈植於氮化鎵/氮化銦鎵多重量子井發光二極體,經發光二極體元件完成後量測其電激發光光譜,確實量得碳離子佈植所形成之黃光放射,證明以佈植方式形成白光二極體的可
能性。 | zh_TW |
dc.description.abstract | The photoluminescence properties of Carbon ion
implantation into p-type GaN followed by rapid thermal annealing (RTA) in N2 ambient have been studied. By varying implantation concentrations, the p-type GaN can be converted into n-type GaN. Photoluminescence studies show that a green emission band could be observed from Cimplanted
GaN:Mg. It was shown that such a green emission
is related to the yellow luminescence observed from epitaxially grown C-doped GaN. The fabrication and characterization of C-implanted InGaN /GaN MQW LED was reported. The EL spectra obtained from the C-implanted LED device operated at 8V exists the peaks centered at
458nm and 525nm. | en_US |
DC.subject | 佈植 | zh_TW |
DC.subject | 碳 | zh_TW |
DC.subject | 氮化鎵 | zh_TW |
DC.subject | 發光二極體 | zh_TW |
DC.subject | 光激發光譜 | zh_TW |
DC.subject | 黃光發射 | zh_TW |
DC.subject | Carbon | en_US |
DC.subject | yellow luminescence | en_US |
DC.subject | GaN | en_US |
DC.subject | LED | en_US |
DC.subject | photoluminescence | en_US |
DC.title | 佈植碳離子於氮化鎵/氮化銦鎵多重量子井發光二極體之特性研究 | zh_TW |
dc.language.iso | zh-TW | zh-TW |
DC.title | Photoluminescence studies of Carbon-Implanted GaN/InGaN M.Q.W. LED | en_US |
DC.type | 博碩士論文 | zh_TW |
DC.type | thesis | en_US |
DC.publisher | National Central University | en_US |