| DC 欄位 |
值 |
語言 |
| DC.contributor | 光電科學與工程學系 | zh_TW |
| DC.creator | 梁致遠 | zh_TW |
| DC.creator | Zhi-Yuan Lian | en_US |
| dc.date.accessioned | 2007-10-1T07:39:07Z | |
| dc.date.available | 2007-10-1T07:39:07Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=93226039 | |
| dc.contributor.department | 光電科學與工程學系 | zh_TW |
| DC.description | 國立中央大學 | zh_TW |
| DC.description | National Central University | en_US |
| dc.description.abstract | 在本篇論文中，我們利用次微米灰階週期性光柵結構和發光二極體 (light-emitting diodes LED) 整合，在發光二極體表面製作出次微米的週期性氮化矽膜灰階結構，近似陣列式的微光學元件，並且能夠對發光二極體的光型做調制。從分析與模擬的結果得知，利用此週期性結構可控制發光二極體的出光特性，由光型分析看出，我們能使LED出光集中在 ±30°的範圍，亦可使LED在±60° 的範圍均勻出光，因此，我們所提出的次微米灰階光柵結構，可有效的調制LED光型。
我們製作結構尺度為次微米光柵，其週期為500 nm，線寬為200 nm，是利用電漿蝕刻等乾式蝕刻法製作出來，不需遷就晶體本身的晶格面，因此，經由設計蝕刻參數可使光柵的形狀做改變，並且可在次波長的尺度下製作出灰階的結構，能拓展灰階結構的應用面。由於灰階週期性光柵本身具有折射率漸變的性質，利用此特性，在微光學元件中，原本需要在結構上方或下方鍍上匹配膜層來修整頻譜，現在僅需利用灰階光柵即可達到類似效果，這對未來次微米結構的整合與設計亦具有更高的自由度與便利性。 | zh_TW |
| dc.description.abstract | In our study, we modulate far-field patterns of LED by using silicon nitride micro structures. We use gray level structures as sub-micro optical elements array, and analyze the far-field patterns of LED modulated by silicon nitride sub-micro structures. From our analysis，we can concentrate far-field pattern intensity above 0.8 in ±30° or spread far-field pattern intensity uniformly above 0.8 in ±60° of LED.
The purpose of structures is a micron scale, which period is 500 nm and the structures is 200 nm. The structures are etched by Inductively-Coupled-Plasma-Etching System. In our study, the purposed sub-micro silicon nitride gray-level grating can be realized. For the far-field patterns modulation of LED, the sub-micro structures can be integrated in array and fabricated on LED to extend the application of LED optical system. | en_US |
| DC.subject | 光型 | zh_TW |
| DC.subject | 發光二極體 | zh_TW |
| DC.subject | 氮化矽 | zh_TW |
| DC.subject | 灰階 | zh_TW |
| DC.subject | LED | en_US |
| DC.subject | far-field patterns | en_US |
| DC.subject | gray level | en_US |
| DC.title | 次微米灰階氮化矽結構對發光二極體光型修整機制之研究 | zh_TW |
| dc.language.iso | zh-TW | zh-TW |
| DC.title | Modulating far-field patterns of LED byusing silicon nitride micro structures | en_US |
| DC.type | 博碩士論文 | zh_TW |
| DC.type | thesis | en_US |
| DC.publisher | National Central University | en_US |