| DC 欄位 |
值 |
語言 |
| DC.contributor | 光電科學與工程學系 | zh_TW |
| DC.creator | 練政廷 | zh_TW |
| DC.creator | Cheng-Ting Lian | en_US |
| dc.date.accessioned | 2007-7-18T07:39:07Z | |
| dc.date.available | 2007-7-18T07:39:07Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=942206031 | |
| dc.contributor.department | 光電科學與工程學系 | zh_TW |
| DC.description | 國立中央大學 | zh_TW |
| DC.description | National Central University | en_US |
| dc.description.abstract | 本論文是以熱阻舟蒸鍍系統配合脈衝式離子助鍍氟化鎂(MgF2)薄膜，研究脈衝式離子源對氟化鎂薄膜的光學特性、水氣吸收特性、微觀結構、表面粗糙度、應力與結晶特性的影響。
光學特性方面，在Constant Mode 離子助鍍下，氟化鎂薄膜的折射率明顯增加了，但是在短波段有著較大的光學損耗，相較於Constant Mode，在Pulse Mode 離子助鍍下，薄膜在短波長的光學損耗明顯減小了，但是有水氣吸收的現象發生；微觀結構方面，在離子助鍍下，薄膜的柱狀結構變得較明顯，柱與柱之間較緻密，薄膜的表面粗糙度在離子助鍍下，隨著Beam Current 增加有變小的趨勢；結晶特性方面，在離子助鍍下，結晶型態並無改變，但是薄膜的結晶方向更一致；應力方面，在Beam Current 1.0A 隨著Beam Current 增加，薄膜的壓應力越來越大。 | zh_TW |
| dc.description.abstract | The deposition of magnesium fluoride optical thin film by using thermal boat evaporation with pulse ion-assisted deposition (IAD) for UV application was investigated in this thesis. Due to the ion beam assistance, the optical properties and micro-structural properties of the magnesium fluorides thin films, including refractive index, surface roughness were significantly improved which are required in laser material processing and semiconductor lithography. | en_US |
| DC.subject | 離子源 | zh_TW |
| DC.subject | 氟化鎂 | zh_TW |
| DC.subject | ion source | en_US |
| DC.subject | magnesium fluoride | en_US |
| DC.title | 脈衝式離子源助鍍氟化鎂薄膜之研究 | zh_TW |
| dc.language.iso | zh-TW | zh-TW |
| DC.title | The research of pulse ion beam-assisted deposition of magnesium fluoride thin film | en_US |
| DC.type | 博碩士論文 | zh_TW |
| DC.type | thesis | en_US |
| DC.publisher | National Central University | en_US |