| dc.description.abstract | The common MEMS processed technology often limits to deposits, lithography etching, laser processing, LIGA etc, So the production cost is expensive. This experiment uses the micro EDM technology, manufacture mold with radius 0.05mm depth 0.02mm micro concave spherical, using the hot embossing machine formation, and processed has material amorphous resin ABS, PMMA, PC, the grain weight approximately is 0.01g~0.016g, then for micro convex spherical structure use hot embossing formation.
In recent years the optics industry including: digital camera, traditional camera, photographic equipment, optics part, lens, back light mold, and LCD optics of concave convex, almost uses PMMA, PC transparent material. ABS is auxiliary and matches the resin to mix the compound material. Therefore this experiment by ABS, PMMA and PC three kind of plastic materials discusses the formation’s the temperature, the pressure, and time etc, to forming influence the precision.
According to the hot embossing experimental results show that, ABS, PMMA, and PC etc, was high precision material to form , with besides the above parameters, control the cooling temperature , and the micro concave spherical mold quality selects, and grinding polished the system the improvement etc, to product of the micro convex spherical structure, was important influence parameter. The experimental result demonstration suitable processing parameter combination, roughness of the microstructure spherical may reach Ra 0.030μm , its micro shape diameter was approximately 50μm spherical , completes conforms with the general manufacture light guide board of the optics plant request. Although the experimentation method was simple, but its micro shape spherical precision forming was good for industry technology development. | en_US |