| DC 欄位 |
值 |
語言 |
| DC.contributor | 光電科學與工程學系 | zh_TW |
| DC.creator | 李孟錡 | zh_TW |
| DC.creator | Meng-Chi Li | en_US |
| dc.date.accessioned | 2012-12-3T07:39:07Z | |
| dc.date.available | 2012-12-3T07:39:07Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=962406006 | |
| dc.contributor.department | 光電科學與工程學系 | zh_TW |
| DC.description | 國立中央大學 | zh_TW |
| DC.description | National Central University | en_US |
| dc.description.abstract | 本論文提出以掃描式白光干涉技術量測光學薄膜之厚度、折射率
以及色散常數。薄膜反射光譜可藉由白光干涉圖之傅立葉振幅而推得，
並利用基因演算法反推薄膜光學常數。在未知的薄膜特性，利用基因
演算法以全域式之搜尋方法，求得最佳的數值解。並針對在量測傅立
葉振幅可能造成之誤差來源，包括波數精準性以及光源在時間和空間
上的變化，進行研究和改善。隨著誤差的減少和演算法的改進，量測
光學薄膜厚度和折射率的結果與橢圓偏振儀比較，其差異皆在 1%以
內。搭配白光干涉儀量測大範圍的反射振幅和單點薄膜之特性，可以
快速重建二維的薄膜厚度，並且延伸至量測多層膜之厚度。 | zh_TW |
| dc.description.abstract | A method to measure thin film thickness, refractive index and
dispersion constants based on white light interferometry is described. The
thin film property is retrieved from the Fourier amplitude of the white
light correlogram and genetic algorithms with elitism to avoid falling into
the local minimum due to the parameter convergence and maintain the
capability to search the global minimum solution. Besides, the sources of
errors in Fourier amplitude, which include the accuracy of wave-number,
light source variation in time, and illumination non-uniformity, are
investigated. With all these errors reduced, the film thicknesses and
refractive indices of four samples measured by white light interferometry
are within 1% of the ellipsometry results. As the accuracy of
measurement improved, the amplitude based method could be capable to
measure thickness profiler of thin-film as well as multi-layer films. | en_US |
| DC.subject | 白光干涉儀 | zh_TW |
| DC.subject | 光學薄膜 | zh_TW |
| DC.subject | 厚度 | zh_TW |
| DC.subject | 折射率 | zh_TW |
| DC.subject | 基因演算法 | zh_TW |
| DC.subject | white-light interferometer | en_US |
| DC.subject | thin-film | en_US |
| DC.subject | thickness | en_US |
| DC.subject | refractive index | en_US |
| DC.subject | genetic algorithm | en_US |
| DC.title | 掃描式白光干涉儀應用在量測薄膜之光學常數 | zh_TW |
| dc.language.iso | zh-TW | zh-TW |
| DC.title | Application of white-light scanning interferometer on optical thin film constant measurement | en_US |
| DC.type | 博碩士論文 | zh_TW |
| DC.type | thesis | en_US |
| DC.publisher | National Central University | en_US |