| DC 欄位 |
值 |
語言 |
| DC.contributor | 化學工程與材料工程學系 | zh_TW |
| DC.creator | 謝修銘 | zh_TW |
| DC.creator | Hsiu-ming Hsieh | en_US |
| dc.date.accessioned | 2010-7-19T07:39:07Z | |
| dc.date.available | 2010-7-19T07:39:07Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | http://ir.lib.ncu.edu.tw:444/thesis/view_etd.asp?URN=973204046 | |
| dc.contributor.department | 化學工程與材料工程學系 | zh_TW |
| DC.description | 國立中央大學 | zh_TW |
| DC.description | National Central University | en_US |
| dc.description.abstract | 本論文針對氧化鋅鋁(Aluminum Zinc Oxide, AZO)透明導電薄膜，於濕氣環境下之穩定性所進行的分析與探討，並藉由此研究結果，設計新的薄膜結構以改善氧化鋅鋁(ZnO : Al2O3=98 wt.%:2 wt.%)薄膜在濕氣環境下之穩定性。
本實驗利用磁控射頻濺鍍系統(RF-magnetron sputter)成長薄膜，將氧化鋅鋁薄膜濺鍍在石英玻璃(quartz)基板上，經過不同氣氛環境之熱處理過後，長時間放置於恆溫高濕試驗機(60±2 ℃, 90±5 %RH)內，並在期間內利用霍爾量測、四點探針座量測電性變化，以紫外光/可見光分光光譜儀系統量測其穿透率光譜變化，以及在高濕試驗前後使用X光電子能譜儀，掃描薄膜表面與內部氧元素鍵結束縛能之改變來監測薄膜內部的微結構變化，將上述所得到的量測結果與氧化鋅鋁薄膜之導電機制與光學結構相互結合探討濕氣環境對氧化鋅鋁透明導電膜所造成的效應。
氧化鋅鋁 (AZO)薄膜經過不同氣氛(真空、氧氣)之退火處理，於濕氣環境下的電阻率變化表現出兩種相異的趨勢，借此推測退火氣氛與表面水分子吸附兩種效應將會造成薄膜內外氧原子濃度差的改變，而當載子形成以氧缺陷為主時，由XPS對氧元素分析結果可知薄膜內載子濃度將受到氧原子擴散的劇烈影響而下降，導致薄膜電性之不穩定。此現象尤其在低製程溫度時更為明顯。
本研究於第二階段，發現鍍上表面鉻(Cr)金屬鍍層可以抑制氧原子擴散，以及增加薄膜內氧元素之鍵結穩定性，尤其在低溫(200 ℃)下即可獲得1.63 x 10-2 Ω-cm及90 %的可見光穿透率，濕氣環境下更是有相當高的穩定性，顯示此材料對於日後替代氧化銦錫(ITO)作為透明導電膜應用在嚴苛環境下之薄膜穩定性有著相當大的研究潛力。
| zh_TW |
| dc.description.abstract | This study focuses on the electrical and optical stability of AZO (ZnO: Al2O3= 98 wt.% : 2 wt.%) transparent conductive thin film in high humidity environment, and discusses their behavior in different annealing ambient (vacuum and oxygen).
In this experiment, we use the RF-magnetron sputter system to deposit the thin films on the quartz substrate. After deposition, there are two different annealing ambient is applied, which are vacuum and oxygen. Finally, these samples were put in a high humidity environmental test system. Using Hall Measurement and 4-points probe stage to measure the change of the electrical properties, the UV/VIS Spectrophotometer used to monitor the transmittance. From the X-ray Photoelectron Spectroscopy result, we can observe the change of the binding energy or chemical state in AZO thin films about each element, like zinc and oxygen.
According to AZO films annealed in different atmospheres (vacuum, oxygen), the trends of resistivity change show big differences among them. There are two effects (annealing ambient and surface adsorption of water molecules) causing an oxygen concentration gradient along the film thickness. When the oxygen vacancy is the dominate mechanism of the carrier formation, the moisture will cause a serious decay of electrical property due to the annihilation of free carriers.
From the second part of results, the Cr-coated AZO structure can exhibit a great electrical property and stability. It shows a 90 % transmittance in visible region. It might be a suitable candidate to replace ITO in the application of those products used in harsh environmental conditions.
| en_US |
| DC.subject | 氧化鋅鋁 | zh_TW |
| DC.subject | 透明導電薄膜 | zh_TW |
| DC.subject | 濕度 | zh_TW |
| DC.subject | 環境試驗 | zh_TW |
| DC.subject | 表面金屬鍍膜 | zh_TW |
| DC.subject | metal-coated layer | en_US |
| DC.subject | environmental test | en_US |
| DC.subject | humidity | en_US |
| DC.subject | AZO | en_US |
| DC.subject | transparent conductive oxide | en_US |
| DC.title | 氧化鋅鋁透明導電薄膜在高濕環境下之行為研究 | zh_TW |
| dc.language.iso | zh-TW | zh-TW |
| DC.title | High-Humidity Study on Aluminum Doped Zinc Oxide Thin Films | en_US |
| DC.type | 博碩士論文 | zh_TW |
| DC.type | thesis | en_US |
| DC.publisher | National Central University | en_US |