| dc.description.abstract | The study is to modify the material surface via Filtered Cathodic Vacuum Arcing (FAVA) and High Power Pulse Magnetron Sputtering (HPPMS). During manufacturing process of plasma coating, titaneum (Ti) is used as the negative pole while acetylene (C2H2) is used as the reaction gas. The Ti-C:H coating applies respectively on the surface of the substrate of WC & SKH51 tool steel and SUS304 stainless steel can modify the surface by reducing friction coefficient and its wearability, so as to verify the effect coating quality of FCVA, and effect of applying wearable DLC film to the manufacturing process of HPPMS.
During FCVA manufacturing process, the experimental parameters based on the variation of substrate bias and target current ,while HPPMS parameters based on substrate bias and substrate-to-target distance. The application of instruments and tools, i.e. glow discharge spectroscopy (GDS), scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), Nanoindenter, pin-on-disk tribometer and scratch tester to perform the mechanical property analytical measurements; i.e. organized structure & hardness, Young’s modulus, friction coefficient, wear rate, and adhesion ability of coating. Via FCVA manufacturing process, the surface of Ti-C:H is smooth, its maximum hardness is 18.3GPa, maximum Young’s modulus is 180GPa, friction coefficient is less than 0.1,wear rate is under 1.28 10-16m3/Nm, and adhesive force is greater than 4.9 Kg. Via HPPMS manufacturing process the result of the surface of Ti-C:H, it maximum hardness is as high as 22.6GPa, the maximum Young’s modulus is 215GPa, friction coefficient is less than 0.165, and adhesive force is greater than 5 Kg. The result of the study shows that FCVA can highly enhance the quality of coating, completely improve the flaw of Cathodic Vacuum Arcing method. By studying FCVA and HPPMS manufacturing process of plasma coating, the adhesive force between the coating layer and substrate is better than general application level, and it contributes a better result to the reduction of friction force and the growth of wearability.
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