| dc.description.abstract | Nb-doped TiO2 (TNO) film is a material with conductivity and
photo-catalytic properties. This research includes two parts, first we investigated
the electrical and optical characteristics of the TNO films. The second part, we
have discussed the photo-catalytic effect. After annealing in vacuum at 370 ℃,
the phase of the deposited TNO film with 90W RF power was transited from
amorphous to anatase The resistivity is about 1.26×10-3 Ω-cm, Hall mobility
is about 1.46 cm2/V-s, and carrier concentration is about 1.89×1021 cm-3, and the
ratio of atom number of titanium and niobium is 6.12. The average
transmittance is about70% and the absorbance is less than 10% in visible
region.
The contact angle of TNO films decreased when the irradiation time
increased, which implies the surface property of TNO films are changed from
hydrophobic to hydrophilic after ultraviolet irradiation. Furthermore, the sheet
resistivity of films is rarely changed under ultraviolet irradiating. For different
niobium concentration TNO films, the methylene blue solution degradation
speed decreased following the sequence of the deposition power, 90W, 95W,
100W, 85W, 80W, which reveals the same tendency of the contact angle
measurement. The higher conductivity, the higher mobility of the carries, and
the photo-excitation of electron-hole pair spreading to the surface faster for the
photocatalytic reaction.
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