| dc.description.abstract | Precision measurement technology is the one of the critical points of the development of precision mechanical industry. Because the laser interferometers possess the measuring features of large measuring range and high resolution simultaneously, they play an important role in the modern length measurement technology.
Because of the rapid development of the precision mechanical industry, the requirements of the measurement parameters are enhanced. The conventional measurement technologies cannot meet these requirements. For this reason, interferometric technology is used in the precision mechanical industry wildly. But the conventional interferometric technology cannot demonstrate its characteristics of high precision under the ordinary environment. Therefore, the interferometer cannot yield expected results in the application of precision mechanical industry.
In summary, the key of the upgrading of precision mechanical industry is to develop the interferometer which can be used in ordinary environment. By the past research, Fabry-Perot interferometer is possessed of the optical structure of the common path. Due to the optical arrangement, Fabry-Perot interferometer can be more insensitive to the environmental disturbances. By the design of the optical structure, the measuring range of Fabry-Perot interferometer can be enlarged up to 500 mm. For this reason, the application of Fabry-Perot interferometer can be more valuable in the field of precision measurement.
In view of this situation, for the measuring condition of the precision mechanical industry under the fluctuating environments, a Fabry-Perot interferometer with the variable optical structures has been proposed. One of the structures is plane-mirror Fabry-Peort interferometer system utilized in small range, high precision and fine mechanical tolerance situations. Another structure is folded Fabry-Peort interferometer system which can be performed in large range and mechanical tolerance situations. By the development of the common path interferometer , the novel arrangement of the optical structure and the optimization of the signal processing model, the measuring range and the resolution of the proposed interferometer can be enhanced. With the aid of this interferometric technology, applications of the common path interferometer for precision mechanical industry can be promoted.
With this development, the interferometric system will be available. From the experimental results, the measuring range is larger than 500 mm, precision is ±0.5μm (±3σ) and linearity is about 1 ppm F.S.. The experimental resolution is less than 4 nm. Finally the application experiment, the proposed interferometer system is suitable for the precision mechanical industry purpose. | en_US |