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姓名	李展進(Chan-chin Li)  查詢紙本館藏	畢業系所	光電科學與工程學系
論文名稱	以奈米球微影術製作表面電漿增強拉曼基板 (Surface enhanced Raman active substrate fabricated by nanosphere lithographic technique)
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摘要(中)	本論文以奈米球微影術製作週期性銀粒子陣列之表面增強拉曼散射基板。首先藉由文獻得知改變週期性銀粒子的大小、結構高度及形狀等各類製程參數，其共振波長位移之趨勢。實驗上以加熱基板的方式，使銀粒子形狀改變並量測其吸光譜，得到共振波長紅移並與文獻相符；另外選用銀粒子陣列共振波長與綠光雷射波長相近的位置進行拉曼量測，且明顯得到R6G分子的拉曼光譜訊號，證明此結構有足夠的增強能力且適用於分子檢測上；最後利用TCSPC系統量測R6G在不同基板上的螢光生命期並探討其與增強係數的關係
摘要(英)	Surface enhanced Raman scattering (SERS) active silver periodic particle array (PPA) substrates are fabricated by nanosphere lithographic technique. Base on the reported results in literatures, the shift of plasmon resonance wavelength can be manipulated via varying the fabrication parameters such as particle size, thickness and shape. Experimentally, thermally induced shape change was observed which results in the red shift of the resonant wavelength. The result is in close agreement with that obtained by Van Duyne. In addition, a local site on the PPA with resonance wavelength close to =532 nm was chosen to examine the resonant Raman response from model molecule Rhodamine 6G (R6G). The measured Raman spectrum, clearly reveals the vibrational fingerprint of the R6G molecule, demonstrating the enhancement capability of the fabricated substrate for molecular analysis substrate. Finally, fluorescence life time measurement of R6G on various substrates was conducted by TCSPC system, with the aim to justify the interplay between substrate quenching effect and the enhancement factor of R6G.
關鍵字(中)	★ 奈米球微影術 ★ 周期性銀粒子陣列 ★ 表面增強拉曼散射 ★ 表面電漿共振	關鍵字(英)	★ nanosphere lithographic technique ★ periodic particle array ★ Surface Enhanced Raman Scattering ★ Surface Plasmon Resonance
論文目次	中文摘要 I Abstract II 誌謝 III 目錄 i 圖目錄 iii 表目錄 v 第一章 緒論 1 1.1 前言 1 1.2 拉曼散射 3 1.3 表面增強拉曼散射 5 1.4 微影技術 6 1.5 研究動機與目的 8 1.6 論文架構 9 第二章 研究方法 10 2.1 表面電漿共振 10 2.1.1 金屬與介電質介面之表面電漿波 11 2.1.2 金屬粒子之局域性表面電漿 14 2.2 局域性表面電漿共振之光學特性 18 2.3 增強係數 23 第三章 樣品製作與實驗架構 24 3.1 樣品之製作與量測流程 24 3.2 奈米球週期性陣列遮罩之製備 25 3.3 金屬銀奈米粒子之製作與消光譜之量測 27 3.4 拉曼訊號量測架構 31 3.5 時間解析螢光光譜架構 32 第四章 結果與討論 34 4.1 Periodic Particle Array(PPA)結構之加熱實驗 34 4.2 不同消光譜位置之R6G拉曼散射譜 36 第五章 結論與未來展望 43 參考文獻 44
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指導教授	戴朝義(Chao-yi Tai)	審核日期	2014-8-20
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