雙共焦顯微鏡用於物體厚度量測

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姓名

蕭宇傑(Yu-Jie Xiao) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

雙共焦顯微鏡用於物體厚度量測
(Double confocal microscopes for the measurement of object thickness)

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摘要(中)

本研究開發一套物體厚度量測系統，應用於量測透鏡的厚度以及表面形貌等關鍵參數。本系統架構為共焦顯微鏡，相較於傳統的顯微鏡系統，兩者間的差異為共焦顯微鏡系統利用了空間針孔，濾除待測物在非焦點平面的反射光，因此在光學顯微技術當中，共焦顯微術擁有了較高的空間解析度。
在量測平行面板厚度實驗中，當塊規的表面移動到系統焦平面位置時，其表面反射光通過針孔由光偵測器所接收，透過線性移動平台的移動量可以進而得到待測物體的厚度值。藉由量測不同厚度之塊規，校正系統因為環境因素影響與機構架設所造成的誤差，從量測塊規的實驗中，驗證此系統的量測能力，量測值與塊規標稱值的差量小於3 um。為了量測透鏡中心厚度值，採用自定心夾具的機構來定位透鏡中心位置，以利透鏡厚度量測實驗。透過實驗驗證本系統的量測性能，其系統解析度為1.8 um，量測物件的厚度最大範圍約是20 mm，以及每一次量測物件厚度的時間小於10 sec。

摘要(英)

This study presents an object thickness measurement system, applicable to measurement of lens thickness and surface topography. The configuration of this system is a confocal microscopy system. As compared to traditional microscopy system, confocal microscopy system utilizes a pinhole to filter out-of-focus light beam from non-focal plane. Therefore, in the field of optical microscopy, confocal microscopy is capable of achieving higher spatial resolution.
In the experiment of panel thickness measurement, surface of the gauge block is moved to focal plane of the system. Reflected light from gauge block is passed through a pinhole and then received by photodetector. Thickness of the sample is obtained by calculation as displacement of linear stage is a known parameter. By measuring gauge blocks of different thicknesses, the system is calibrated to compensate errors caused by environmental factors and mechanical system. Measurement capability of the system is verified through the gauge block measurement experiment. The differences between the measured values and the standard values are less than 3 um.
In order to measure central thickness of a lens, self-centering lens mount is used for alignment. Performance of the measurement system is verified through experiments. This measurement system is able to achieve resolution of 1.8 um, maximum measuring range of approximately 20 mm, and operating time of 10 sec.

關鍵字(中)

★ 共焦顯微術
★ 面板厚度量測
★ 鏡片厚度量測

關鍵字(英)

★ confocal microscope technology
★ panel thickness and lens thickness measurement

論文目次

摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VI
表目錄 IX
第一章緒論 1
1-1 研究背景 1
1-2 文獻回顧 3
1-2-1 共焦顯微系統 3
1-2-2 透明物體量測 6
1-3 研究目的 8
1-4 論文架構 9
第二章基礎理論 10
2-1 光學顯微系統原理 10
2-1-1 光學繞射理論 13
2-1-2 光學顯微鏡系統橫向解析度 14
2-2 單點共焦顯微鏡量測原理 17
2-3 厚度量測系統 24
2-4 小結 25
第三章系統架構 26
3-1 系統光源選用 26
3-2 量測系統架構 28
3-2-1 光學量測系統架構 28
3-2-2 機械手臂與線性移動平台 32
3-2-3 量測軟體與流程 34
3-2-4 待測物載盤設計及光路調整 36
3-3 透明曲面量測之可行性分析 40
3-4 系統校正 48
3-5 小結 51
第四章實驗結果與討論 52
4-1量測實驗 52
4-1-1 量測流程 52
4-1-2 平板厚度量測 54
4-1-3 曲面透鏡厚度量測 56
4-1-4 物體表面形貌量測 68
4-2 量測系統性能分析 71
4-2-1 量測解析度 71
4-2-2 量測物件厚度最大範圍 72
4-2-3 量測時間 72
4-3 小結 72
第五章誤差分析 73
5-1 系統誤差 73
5-1-1 非平行光入射 73
5-1-2 載盤傾斜誤差與餘弦誤差 75
5-2 隨機誤差 76
5-2-1 環境溫度 77
5-2-2 環境擾動及機械振動 77
5-2-3 電子雜訊 77
5-3 小結 78
第六章結論與未來展望 79
6-1 結論 79
6-2 未來展望 79
參考文獻 80

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指導教授

李朱育(Yu-Yi Lee)

審核日期

2018-11-30

推文