矽基熱電元件開發及特性量測

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姓名

吳孟昕(Meng-Hsin Wu) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

矽基熱電元件開發及特性量測
(The Research and Measurement of Si-based Thermoelectric Devices)

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至系統瀏覽論文 ( 永不開放)

摘要(中)

能源議題是近年來最重要的議題之一，目前人類最常使用的火力發電及核能發電都會產生無法利用的熱能，若是能夠利用熱電材料將這些熱能轉換成為電能，將能夠更有效的使用這些能源。
本研究使用輕摻雜之矽晶片，先在未拋光面鍍上鎳，進行矽化鎳反應後，利用一步金屬輔助化學蝕刻製作奈米線，進行P/N-type摻雜後進行封裝，量測範圍從室溫到473K，探討其熱電特性。

摘要(英)

The energy issue is one of the most important issues in recent years. At present, the most commonly used thermal power generation and nuclear power generation will generate unutilized heat energy. If it can convert these thermal energy into electrical energy by using thermoelectric materials, it will be able to use these energy more effectively.
In this study, a light-doped wafer was used. First, nickel was plated on the unpolished surface. After the silicide reaction, the nanowire was fabricated by one-step metal-assisted chemical etching, and the nanowire was doped and packaged. The thermoelectric properties measured was from room temperature to 473K.

關鍵字(中)

★ 矽奈米線

關鍵字(英)

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
第一章、導論 1
1-1前言 1
1-2熱電歷史 1
1-3熱電效應 2
1-4研究動機 4
第二章、實驗方法與儀器 6
2-1 金屬輔助化學蝕刻法(Metal-assisted chemical etch) 6
2-2 聚醯亞胺(Polyimide)填充 9
2-3 儀器量測 9
2-3-1 電導率量測 9
2-3-2 Seebeck量測 12
2-3-3 結構分析 13
2-3-4 材料分析 14
第三章、實驗流程與步驟 16
3-1 前言 16
3-2 實驗流程設計 17
3-3 實驗步驟 18
3-3-1 蝕刻矽奈米線 18
3-3-2 N-type摻雜 19
3-3-3 P-type摻雜 19
3-3-4 聚醯亞胺填充矽奈米線晶片 20
3-3-5 紫外光臭氧清洗機(UV-Ozone Stripper) 21
3-3-6 手術刀切割元件 21
3-3-7 量測元件製作 21
第四章、實驗結果與討論 28
4-1 前言 28
4-2 結構分析 28
4-3 XRD分析 34
4-4 N/P-type之量測 36
4-4-1 電導率量測 36
4-4-2 Seebeck係數量測 36
4-4-3 功率因子計算 36
第五章、結論 40
參考文獻 41

參考文獻

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指導教授

辛正倫(Cheng-Lun Hsin)

審核日期

2018-10-5

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