基於漸逝波及損耗模態共振原理設計製作側磨Ｄ形光纖感測器

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黃晨媛(Chen-Yuan Huang) 查詢紙本館藏

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光電科學與工程學系

論文名稱

基於漸逝波及損耗模態共振原理設計製作側磨Ｄ形光纖感測器

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至系統瀏覽論文 (2029-7-4以後開放)

摘要(中)

本研究旨在開發高靈敏度、多功能的光纖感測器，以克服現有電子式感
測器的問題。主要研究目標包括使用側磨拋光技術製作D形多模和單模光
纖，並應用電子鎗蒸鍍技術沉積不同材料（如??2?5、???2、??3）的單層
薄膜於光纖拋光面，進而設計及製作高靈敏度漸逝波(Evanescent Wave)與損
耗模態共振（LMR）的光纖感測器。本研究設計開發新型的葡萄糖水溶液
折射率、環境溫度和二氧化碳濃度三種光纖感測器，並優化感測器的製程參
數以提升其靈敏度和性能。實驗結果顯示，這些光纖感測器在葡萄糖水溶液
折射率、環境溫度和二氧化碳濃度感測方面均具有較高的靈敏度，顯示出在
環境參數監測中的潛力。
本研究於D形單模和多模光纖上鍍製100 nm ??2?5薄膜，測得葡萄糖
水溶液折射率感測的靈敏度分別為6406.44 nm/RIU和27.723 dB/RIU；在環
境溫度感測方面，鍍製80 nm ???2薄膜的D形光纖感測器在30℃至150℃
範圍內，單模和多模光纖的靈敏度分別為1.61 nm/℃和7.68×10-3 dB/℃；在
二氧化碳濃度感測方面，鍍製 90 nm ??3薄膜的 D 形光纖感測器在 500
ppm至9000 ppm範圍內，單模和多模光纖的靈敏度分別為3.56 counts /ppm
和3.18 counts /ppm。本研究結果顯示，不同金屬氧化物薄膜應用於側磨D
形光纖感測器能夠有效地提升特定環境參數的靈敏度，並在抗電磁干擾、高
靈敏度、耐環境性、安全性、遠距離傳輸和高速監測等方面具有優勢。

摘要(英)

This study aims to develop highly sensitive and multifunctional fiber optic
sensors to overcome the issues associated with existing electronic sensors. The
main research objectives include the fabrication of D-shaped multimode and
single-mode fibers using side-polishing techniques and the deposition of various
materials (such as ??2?5 ???2, ??3) as single-layer thin films on the polished
surfaces using electron gun evaporation. This will lead to the design and
fabrication of high-sensitivity evanescent wave and loss mode resonance (LMR)
fiber optic sensors. The study involves designing and developing three types of
novel fiber optic sensors for glucose solution refractive index, ambient
temperature, and carbon dioxide concentration, as well as optimizing the sensor
fabrication parameters to enhance sensitivity and performance.
Experimental results indicate that the proposed fiber optic sensors exhibit
high sensitivity in detecting the refractive index of glucose solutions, ambient
temperature, and carbon dioxide concentration, demonstrating their potential in
environmental parameter monitoring. For glucose solution refractive index
sensing, D-shaped single-mode and multimode fibers coated with 100 nm ??2?5
thin film, the sensitivity is 6406.44 nm/RIU and 27.723 dB/RIU, respectively. For
temperature sensing in the range of 30°C to 150°C, D-shaped fiber optic sensors
coated with 80 nm ???2 thin film showed the sensitivity is 1.61 nm/°C and
7.68×10-3 dB/°C for single-mode and multimode fibers, respectively. For carbon
dioxide concentration sensing in the range of 500 ppm to 9000 ppm, D-shaped
fiber optic sensors coated with 90 nm ??3 thin film exhibit the the sensitivity is 3.56 counts/ppm and 3.18 counts/ppm for single-mode and multimode fibers,
respectively.
This study′s results indicate that applying different metal oxide films on side
polishing D-shaped fiber optic sensors can effectively enhance the sensitivity to
specific environmental parameters. These evanescent waves and LMR fiber-optic
sensors have advantages in terms of electromagnetic interference resistance, high
sensitivity, environmental durability, safety, long-distance transmission, and high
speed monitoring.

關鍵字(中)

★ 側磨拋光技術
★ 損耗模態共振
★ 電子鎗蒸鍍技術
★ 葡萄糖水溶液折射率感測器
★ 環境溫度感測器
★ 二氧化碳濃度感測器

關鍵字(英)

★ Side-polishing technique
★ loss mode resonance (LMR)
★ electron gun evaporation
★ glucose solution refractive index sensor
★ temperature sensor
★ carbon dioxide concentration sensor

論文目次

摘要 i
Abstract ii
誌謝 iv
目錄 v
圖目錄 viii
表目錄 xi
第一章緒論 1
1-1 研究動機 1
1-2 研究目的 2
1-3 文獻回顧 3
1-3-1 光纖感測器的種類 3
1-3-2 側磨D形光纖製作 7
1-3-3 損耗模態共振(LMR) 9
1-3-4 光纖液體折射率感測器 11
1-3-5 光纖相對溫溼度感測器 14
1-3-6 光纖氣體感測器 12
1-4 研究方法 19
第二章基本理論 23
2-1 側磨光纖 25
2-2 漸逝波 28
2-3 鍍膜光纖共振原理 31
2-3-1 損耗模態共振與表面電漿共振差異 32
2-3-2 損耗模態共振之薄膜理論 35
第三章實驗設計與方法 38
3-1 實驗流程 39
3-2 側磨D形光纖製作 40
3-3 光學薄膜製程技術 41
3-3-1 電子鎗蒸鍍技術 43
3-3-2 離子輔助沉積技術 44
3-4 側磨光纖感測器實驗架構 44
3-4-1 葡萄糖水溶液折射率感測實驗 44
3-4-2 溫度感測實驗 46
3-4-3 二氧化碳濃度感測實驗 47
第四章實驗結果與討論 48
4-1側磨D形光纖光譜量測 48
4-2基於損耗模態共振的側磨光纖感測器架構 50
4-3葡萄糖水溶液折射率感測實驗 54
4-3-1單模側磨光纖葡萄糖水折射率感測器 54
4-3-2多模側磨光纖葡萄糖水折射率感測器 56
4-4溫度感測實驗 59
4-4-1單模側磨光纖環境溫度感測器 60
4-4-2多模側磨光纖環境溫度感測器 62
4-5二氧化碳濃度感測實驗 65
4-5-1單模側磨光纖二氧化碳濃度感測器 66
4-5-2多模側磨光纖二氧化碳濃度感測器 67
第五章結論 71
5-1研究成果 71
5-2未來展望 72
參考文獻 73

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指導教授

孫文信(Wen-Shing Sun)

審核日期

2024-7-15

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