光學薄膜應力量測與分析之探討

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姓名

潘鼎翔(Ding-Shang Pan) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

光學薄膜應力量測與分析之探討
(The measurement and analysis of Stress for Optic Thin Film)

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摘要(中)

本論文探討利用Twyman Green干涉儀，配合相位偏移技術，擷取干涉圖形，在經由Hariharan相位還原法，分析干涉圖形，可得到其相位圖，並可知其基板的表面輪廓，而經由測定基板在鍍膜前後的面形變化量，求的其應力值。另利用Zernike 多項式擬合法，來扣除人為的誤差，如傾斜，離焦等…其方法比其他的量測技術上，更為精確。接著則利用電子鎗蒸鍍薄膜材料在配合離子輔助鍍膜系統，製鍍光學薄膜，利用不同的回火溫度來作處理，來尋求其高折射率、低吸收、低表面粗糙度、低應力的光學薄膜。

摘要(英)

The thesis make use of Twyman Green interferometry and phase shift interferometry to grab interferogram. By Hariharan PSI algorithm we can analyze interferogram in order to get the phase map and know the substr- ate contour map. The stress in thin film can be derived by comparing the deflection of the substrate before and after film deposition . We also use Zernike polynomial fitting algorithm to remove errors,such as tilt and dfocus.Compared with other techniques,the present method is more accurate.we use e-beam evaporation(PVD) with ion-assisted deposition(IAD) to evaporate optical thin film,by using diffenent baking temperature to find high refractive index、low extinction coefficient、low roughness、and low stress in the optical thin film.

關鍵字(中)

★ 應力量測
★ 干涉儀
★ Zernike 多項式
★ 相位還原演算法

關鍵字(英)

★ Zernike polynominal fitting
★ stress
★ PSI

論文目次

中文摘要‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧I
英文摘要‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧II
致謝辭‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧III
目錄‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧IV
圖目錄‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧VII
表目錄‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧X
第一章緒論‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧1
1-1研究應力的基本動機‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 1
1-2薄膜應力成因‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 2
1-3能量法推導單層膜應力公式‧‧‧‧‧‧‧‧‧‧‧‧ 4
第二章基本理論‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧8
2-1 PSI(phase shift interferometry)相位還原演算‧‧‧8
2-2 PSI相位還原疊加雜訊的濾除‧‧‧‧‧‧‧‧‧‧‧ 14
2-2-1 平均法濾鏡(Mean Filter) ‧‧‧‧‧‧‧‧‧‧15
2-2-2中值濾鏡(Median Filter) ‧‧‧‧‧‧‧‧‧‧16
2-2-3 Capanni’s 適當中值濾鏡‧‧‧‧‧‧‧‧ ‧‧16
2-2-4 Qian’s 可調制適合大小點數之濾鏡‧‧‧ ‧‧17
2-3 波前擬合‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧20
2-3-1 Zernike多項式‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧21
2-3-2 Zernike多項式擬合的演算法‧‧‧‧‧‧‧‧‧24
2-3-3 Zernike多項式的驗證‧‧‧‧‧‧‧‧‧‧‧‧27
2-3-4 Seidel aberration 係數 ‧‧‧‧‧‧‧‧‧ ‧33
第三章薄膜應力量測技術‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 38
3-1傳統應力量測方法‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧38
3-1-1懸臂樑法‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧38
3-1-2 牛頓環法‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ ‧39
3-1-3 X光繞射法‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 40
3-2干涉相移式(Twyman-Green)應力量測系統‧‧‧‧‧‧‧42
3-3系統誤差分析‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧47
第四章實驗儀器架構與測量儀器‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 51
4-1實驗架構 ‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 51
4-1-1 電子槍蒸鍍系統‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 51
4-2 測量儀器‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧53
4-2-1光譜儀‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 53
4-2-2原子力顯微鏡(AFM) ‧‧‧‧‧‧‧‧‧‧‧‧‧54
4-2-3顯微鏡干涉儀(WYKO SP3200) ‧‧‧‧‧‧‧‧‧56
4-2-4 Twyman-Green干涉相移式應力量測‧‧‧‧‧‧ 57
第五章：實驗結果與分析討論‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧58
5-1 實驗參數‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧ 58
5-2 退火處理對光學常數的影響‧‧‧‧‧‧‧‧‧‧‧ 60
5-3 退火處理對表面粗糙度的影響‧‧‧‧‧‧‧‧‧‧ 63
5-4 退火處理對應力的影響‧‧‧‧‧‧‧‧‧‧‧‧‧ 64
第六章：結論及未來展望‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧70
參考文獻‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧‧71

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指導教授

李正中(Cheng-Chung Lee)

審核日期

2003-7-7

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