矽光波導元件光耗損研究

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姓名

陳意智(Yi-Chih Chen) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

矽光波導元件光耗損研究
(Optical Losses in SOI-based Waveguides)

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摘要(中)

我們利用光束傳播法來模擬光在絕緣層上矽晶波導的損耗,包含耦合損耗,彎曲損耗,以及傳播損耗.先最佳化出波導最佳的傳導截面來達到最小損耗,再進一步模擬一對八的200GHz的陣列波導光柵和一對八的光分歧器並製作出來,並探討元件的損耗.

摘要(英)

In this work, we used beam propagation method to simulate the optical losses, including of coupling loss, bending loss, and propagation loss, in silicon-on-insulator-based waveguides. The optimized dimensions of the waveguides for light propagation with low losses were studied. According to the waveguide dimensions, we designed and fabricated a 1x8 200GHz arrayed-waveguide grating (AWG) and a 1x8 multimode interference (MMI) power splitter in silicon-on-insulator wafer. The origin of optical losses of these devices were discussed.

關鍵字(中)

★ 陣列波導光柵
★ 光分歧器
★ 多模干涉
★ 損耗
★ 波導

關鍵字(英)

★ multimode interference
★ waveguides
★ power splitters
★ loss
★ arrayed-waveguide gratings

論文目次

Abstract..............................i
Acknowledgements.............................ii
Contents..............................iii
List of figures..............................v
List of tables.............................ix
Chapter 1、Introduction.............................1
Chapter 2、Method of design.............................6
2-1 Finite difference beam propagation method.............................7
2-2 MMI and self-imaging theory.............................10
2-3 Rowland circle...............................11
2-4 Arrayed waveguide gratings.............................16
2-5 Conclusions.............................20
Chapter 3、Loss in SOI waveguides ..............................21
3-1 Loss due to mismatch.............................23
3-2 Coupling loss.............................24
3-3 Bending loss.............................31
3-4 Propagation loss.............................35
3-5 Insertion loss.............................37
3-6 Conclusions.............................39
Chapter 4、Design and measurement.............................40
4-1 Loss and channel waveguide.............................41
4-2 AWG.............................44
4-3 Power splitters.............................48
4-4 Conclusions..............................51
Chapter 5、Conclusions............52
Reference...............57

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指導教授

陳啟昌(Chii-Chang Chen)

審核日期

2005-3-23

推文