以高靈敏度之監控波長改善光學薄膜之製鍍成效

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：16

、訪客IP：3.148.106.159

姓名

吳鍇(Kai Wu) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

以高靈敏度之監控波長改善光學薄膜之製鍍成效
(Improvement of the optical coating process by cutting layers with sensitive monitor wavelengths)

相關論文

★ 半導體雷射控制頻率	★ 比較全反射受挫法與反射式干涉光譜法在生物感測上之應用
★ 193nm深紫外光學薄膜之研究	★ 超晶格結構之硬膜研究
★ 交錯傾斜微結構薄膜在深紫外光區之研究	★ 膜堆光學導納量測儀
★ 紅外光學薄膜之研究	★ 成對表面電漿波生物感知器應用在去氧核糖核酸及微型核糖核酸雜交反應檢測
★ 成對表面電漿波生物感測器之研究及其在生醫上的應用	★ 探討硫化鎘緩衝層之離子擴散處理對CIGS薄膜元件效率影響
★ 以反應性射頻磁控濺鍍搭配HMDSO電漿聚合鍍製氧化矽摻碳薄膜阻障層之研究	★ 掃描式白光干涉儀應用在量測薄膜之光學常數
★ 量子點窄帶濾光片	★ 以量測反射係術探測光學薄膜之特性
★ 嵌入式繼光鏡顯微超頻譜影像系統應用在口腔癌切片及活體之設計及研究	★ 軟性電子阻水氣膜之有機層組成研究

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

[檢視]

[下載]

本電子論文使用權限為同意立即開放。
已達開放權限電子全文僅授權使用者為學術研究之目的，進行個人非營利性質之檢索、閱讀、列印。
請遵守中華民國著作權法之相關規定，切勿任意重製、散佈、改作、轉貼、播送，以免觸法。

摘要(中)

對於一個製程昂貴的光學薄膜元件來說，更為精緻和精確的監控是必要的。本文提出了一個新的監控方法，藉由薄膜光學理論的數學的推演分析，找出不同膜堆的最佳監控波長，並計算出每層膜厚對中心波長的厚度補償。此方法兼具了高靈敏度的監控效果和保持中心波長不偏移的優點。模擬結果證明，以此法監控所製鍍而成的光學濾片，其成效明顯比用傳統的極值點監控法所製鍍者優良。

摘要(英)

For a costly optical element production, more precise monitor method is necessary. A finer monitor method is proposed. Based on numerical analysis, the most sensitive monitor wavelength is clearly found out, and the thickness compensation for central wavelength is calculated. This method not only can cut layers precisely, but also keep the central wavelength in the right position. It is shown that the performance of optical thin film element monitored by this new method is much better than by the turning point method in coating process.

關鍵字(中)

★ 光學監控
★ 光學薄膜
★ 監控靈敏度

關鍵字(英)

★ optical coating
★ monitoring sensitivity
★ optical monitor

論文目次

Contents
摘要 I
Abstract II
Contents III
Figures V
1.Introduction 1
2.Basic Concepts[3] 3
2.1.Introduction to basic physical concept 3
2.2.The transmittance and reflection of the single interface 6
2.3.Equivalent admittance and reflectance of the single layer thin film 8
2.4.Equivalent admittance value of a multilayer thin film 11
3.Conventional Monitor Methods 13
3.1.Quartz-crystal monitor[4] 13
3.2.Turning point monitoring method[5] 15
3.3.Over-shot monitor method[8] 17
4.Principle and Methods of the Selected Sensitive Monitor Wavelength Monitoring Method 20
4.1.Analysis of the sensitivity for different monitor wavelength 20
4.2.Introduction to a novel monitoring method: SSMW method 25
5.Simulation 32
5.1.Comparison between different monitor methods for reflector 32
5.2.Comparison between different monitor methods for narrow-band pass filter 34
5.3.The influence of the bandwidth of monitoring light 38
5.4.The deviation of the material refractive index 41
6.Conclusion 47
7.Future Work 48
8.Reference 49

參考文獻

1.Cheng Zang, Yongtain Wang, and Weiqiang Lu, 2004, “A single-wavelength monitor method for optical thin-film coatings”, Opt. Eng., 43, pp. 1439-1443.
2.B. Vidal, 1979, A. Fornier and E Pelletier, “Wideband optical monitoring of nonquarter wave multilayer filter”, Appl. Opt., 18, pp.3851-3856.
3.Macleod H. A., 1986, “Thin-Film Optical Filters”, Adam Hilger Ltd, Bristol., Chap. 2, pp. 62-66.
4.Abdul Wajid, 1997, “On the accuracy of the quartz-crystal microbalance (QCM) in thin-film depositions”, Sensors and Actuators A, 63, pp. 41-46.
5.H. A. Macleod, 1972, “Turning value monitoring of narrow-band all-dielectirc thin-film optical filters”, Optica Acta, 19, pp. 1-28.
6.H. A. Macleod, 1977, “Error compensation mechanisms in some thin-film monitor systems”, Opt. Acta, 17, pp. 907-930.
7.Stephane Larouche, Aram Amassian, Bill Baloukas, and Ludvik Martinu, 2004, “Turning-point monitoring is not simply optical thickness compensation”, Optical Interference Coatings Ninth Topical Meeting, TuE8.
8.P. Bousquet, A. Fornier, R. Kowalczyk, E. Pwlletier, 1972, and P. Roche, “Optical filters: monitoring process allowing the auto-correction of thickness errors”, Thin Solid Films, 13, pp. 285-290.
9.C.J. van der Laan, 1986, “Optical Monitoring of Nonquarterwave Stacks”, Applied Optics, Vol.25, pp.753-760.
10.Y. R. Chen, 2004, “Monitor of film growth by admittance diagram”, Master Thesis of National Central University of Taiwan, Chap. 3, pp.15-17.
11.Macleod H. A., 1981, “Monitor of optical coatings”, Appl. Opt., 20, pp. 82-89.

指導教授

李正中(Cheng-Chung Lee)

審核日期

2005-7-19

推文