磨料噴射技術應用於精微拋光之研究

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姓名

官君宇(Chun-Yu Kuan) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

磨料噴射技術應用於精微拋光之研究
(A Study on Micro Polishing by Abrasive Jet Technology)

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摘要(中)

本研究主要建構出一自動磨料噴射精微拋光系統，並以放電加工後SKD61模具鋼表面作為改善對象，探討磨料噴射精微拋光法對放電表面拋光改善效果。
研究主要分為兩大部分，首先自行組裝自動磨料噴射精微拋光系統，探討磨料噴射精微拋光法的加工特性與系統各參數加工極限，再利用田口實驗計畫法進行實驗規劃，以獲得磨料噴射精微拋光法各參數對表面粗糙度改善率與材料移除量的影響與最佳水準所在。接著由所獲得之最佳參數組合依續探討改變加工時間、加工路徑、初始放電面、添加劑種類、磨料種類與粒徑等加工參數，以追求磨料噴射精微拋光法對放電表面拋光至鏡面改善效果。
實驗結果發現以自行開發之自動磨料噴射精微拋光系統配合田口實驗所獲得之最佳參數組合，可將表面粗糙度1.03μm Ra (7.74μm Rmax)的放電加工面降至0.13μm Ra (0.90μm Rmax)，改善率達87%，且表面呈現近似鏡面反射效果。另外研究亦探討研磨後之工件表面材料特性，發現利用混合SiC 磨粒進行噴射拋光加後之工件具有SiC嵌入表面效應，由EDS 定量分析結果，其表面SiC含量有明顯增加，且表面微硬度亦會增加。

摘要(英)

This research mainly constructs out an automatic abrasive jet system for micro polishing machining, and takes EDMed SKD61 surface as target of improving. The EDMed surface are investigated to improve the surface polishing effect by abrasive jet micro polishing machining (AJMPM) after processing.
The study is divided into two major parts. First, the machining characteristic of AJMPM and the limit of system parameters will be discussed. Then, making use of Taguchi Method to obtain the optimization of manufacturing process parameters for surface roughness improvement and material removal weight on AJMPM. Second, the best combination of parameters is used to continue discussing the different of machining time, machining path, initial surface roughness, kinds of additive, abrasive mesh and kinds of abrasive in turn. Expecting that the EDMed surface can be improved like a mirror after AJMPM.
From the experimental results find that using the best combination of parameters by Taguchi Method on automatic abrasive jet micro polishing system developed by myself, the surface roughness value can drop from 1.03 μmRa to 0.13 μmRa and 7.74 μmRmax to 0.90 μmRmax, the improvement rate up to 87% and the surface is similar to a reflection mirror. Furthermore, studies are also investigated the surface characteristic of workpiece after machining. From EDS quantitative analysis result reveal that using the SiC abrasive after AJMPM, the SiC content on workpiece surface is going to increase obviously and micro hardness of surface will also increase owing to the surface insertion effect (SiC particles).

關鍵字(中)

★ 田口品質工程
★ 表面粗糙度
★ 磨料噴射
★ 拋光
★ 放電加工

關鍵字(英)

★ abrasive jet machining(AJM)
★ polishing
★ electrical discharge machining(EDM)
★ Taguchi Method
★ surface roughness

論文目次

中文摘要i
英文摘要ii
謝誌iii
目錄iv
圖目錄vii
表目錄xi
第一章緒論1
1-1 研究背景1
1-2 研究動機與目的 2
1-3 研究方法5
1-4 論文架構5
第二章文獻回顧7
2.1 放電製程改善探討7
2.2 表面拋光改善探討8
2.3 磨料噴射加工法探討9
2.4 田口實驗計畫法探討11
第三章實驗原理與設備13
3-1 放電加工法基本原理13
3-1-1放電加工材料去除機制14
3-2 磨料噴射加工法基本原理17
3-2-1 磨料噴射加工材料移除機制18
3-3 田口品質工程基本原理19
3-3-1 變異數分析(ANOVA)及F檢定（F-test）23
3.4 實驗設備26
3-4-1 加工設備26
3-4-2 量測觀察設備 29
3-5 實驗材料31
3-5-1 實驗前置準備 32
3-6 實驗流程圖33
第四章自動磨料噴射精微拋光系統之建構34
4-1 系統設計與建構 34
4-2系統性能與加工特性分析37
4-2-1 系統入出口壓力差異37
4-2-2 乾式與濕式加工對表面粗糙度之影響40
4-2-3 磨料噴射精微拋光法應用於不同工件材質加工特性分析 42
4-2-4 不同加工高度對加工面積之影響44
4-3 結論 46
第五章磨料噴射精微拋光法應用於放電表面之改善 47
5-1 實驗條件與實驗規劃47
5-1-1 研究內容49
5-2 結果與討論50
5-2-1 田口品質工程分析最佳參數組合50
5-2-2 ANOVA分析56
5-2-3 驗證實驗58
5-2-4 磨料噴射加工參數對各品質特性之差異比較60
5-3 結論 69
第六章自動磨料噴射精微拋光效果之探討70
6-1 加工時間對表面精微拋光之影響70
6-2 加工路徑對表面精微拋光之影響73
6-3 初始放電面對表面精微拋光之影響76
6-4 添加劑種類對表面精微拋光之影響81
6-5 磨料粒徑對表面精微拋光之影響86
6-6 磨料種類對表面精微拋光之影響89
6-7 表面特性探討93
6-7-1 加工表面成分分析93
6-7-2 微硬度試驗94
6-7-3 腐蝕試驗與再鑄層觀察97
6-7-4 磨料噴射加工法表面鏡面拋光結果 98
6-8 結論 101
第七章總結論 102
參考文獻 103
英文文獻 103
中文文獻 108
個人簡歷 109

參考文獻

英文文獻
1.E. Belloy，A. Sayah，M.A.M. Gijs, “Oblique powder blasting for three-dimensional micromachining of brittle materials”, Sensors and Actuators A 92 (2001) 358-363.
2.W. Theisen, A.Schuermann, “Electro discharge machining of nickel–titanium shape memory alloys”, Materials Science and Engineering A378 (2004).200-204.
3.Hideo Takino ,Toshimitsu Ichinohe , Katsunori Tanimoto , Syuichi Yamaguchi ,Kazushi Nomura, Masanori Kunieda, “High-quality cutting of polished single-crystal silicon by wire electrical discharge machining”, Article Precision Engineering 29 (2005) 423-430.
4.A. Curodeau, M. Richard, L. Frohn-Villeneuve, “Molds surface finishing with new EDM process in air with thermoplastic composite electrodes,” Journal of Materials Processing Technology 149 (2004) 278–283.
5.P. Pec¸as, E. Henriques, “Influence of silicon powder-mixed dielectric on conventional electrical discharge machining,” International Journal of Machine Tools & Manufacture 43 (2003) 1465–1471.
6.Leonardo S. Andrade, Sandro C. Xavier, Romeu C. Rocha-Filho, Nerilso Bocchi, Sonia R. Biaggio, “Electropolishing of AISI-304 stainless steel using an oxidizing solution originally used for electrochemical coloration”, Electrochimica Acta 50 (2005) 2623–2627.
7.E.-S. Lee, “Machining Characteristics of the Electropolishing of Stainless Steel (STS316L)”, The International Journal of Advanced Manufacturing Technology 16 (2000) 591–599.
8.Shaohui Yin, Takeo Shinmura, “Vertical vibration-assisted magnetic abrasive finishing and deburring for magnesium alloy”, International Journal of Machine Tools & Manufacture 44 (2004) 1297–1303.
9.Hitomi Yamaguchi, Takeo Shinmura, “Internal finishing process for alumina ceramic components by a magnetic field assisted finishing process”, Precision Engineering 28 (2004) 135–142.
10.R. Balasubrama,J. Krishnan,N. Ramakrishnan, “A study on the sharp of the surface generated by abrasive jet machining”, Journal of Materials Processing Technology 121 (2002) 102-106.
11.Y.H. Guu, H. Hocheng, C.Y. Chou, C.S. Deng, “Effect of electrical discharge machining on surface characteristics and machining damage of AISI D2 tool steel”, Materials Science and Engineering A358 (2003) 37–43.
12.K.M. Shu, G.C. Tu, “Study of electrical discharge grinding using metal matrix composite electrodes”, International Journal of Machine Tools & Manufacture 43 (2003) 845–854.
13.G. Cusanelli, A. Hessler-Wyser, F. Bobard, R. Demellayer, R. Perez, R. Flükiger, “Microstructure at submicron scale of the white layer produced by EDM technique”, Journal of Materials Processing Technology 149 (2004) 289–295.
14.B. Mohana, A. Rajadurai b, K.G. Satyanarayana, “Electric discharge machining of Al–SiC metal matrix composites using rotary tube electrode”, Journal of Materials Processing Technology 153 (2004) 978-985.
15.Jae young Choi, Hae do Jeong, “A study on polishing of molds using hydrophilic fixed abrasive pad”, International Journal of Machine Tools & Manufacture 44 (2004) 1163–1169.
16.Yoshiyuki Unoa, Akira Okadaa, Kensuke Uemurab, Purwadi Raharjo b,Toshihiko Furukawa , Kosaku Karato, “High-efficiency finishing process for metal mold by large-area electron beam irradiation”, Source: Precision Engineering 29 (2005).449-455.
17.Henk Wensink,Henri V Jansen,J W Berenschot and Miko C Elwenspoek, “Mask materials for poeder blasting”, J Micromech. Microeng. 10 (2000) 175-180.
18.Henk Wensink, Henri V Jansen, J W Berenschot and Miko C Elwenspoek, “High Resolution Powder Blast Micromachining”, Micro Electro Mechanical Systems (2000) 769-774.
19.Stefan Schlautmann, Henk Wensink, Richard Schasfoort, Miko Elwenspoek, Albert van den berg, “Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips withintegrated conductivity sensors”, J.Micromech.Microeng.11 (2001) 386-389.
20.M. Wakuda, Y. Yamauchi, S. Kanzaki, ” Effect of workpiece properties on machinability in abrasive jet machining of ceramic materials”, Precision Engineering Journal of the International Societies for Precision Engineering and Nanotechnology 26 (2002) 193–198.
21.J.A. Plaza, M.J. Lopez, A. Moreno, M. Duch, C. Cané, “Definition of high aspect ratio glass columns”, Sensors and Actuators A105 (2003) 305–310.
22.Deng Jianxin, Feng Yihua, Ding Zeliang, Shi Peiwei, “Wear behavior of ceramic nozzles in sand blasting treatments”, Journal of the European Ceramic Society 23 (2003) 323–329.
23.Manabu Wakuda, Yukihiko Yamauchi, Shuzo Kanzaki, “Material response to particle impact during abrasive jet machining of alumina ceramics”, Journal of Materials Processing Technology 132 (2003) 177–183.
24.Dong-Sam Park, Myeong-Woo Cho, Honghee Lee , Won-Seung Cho, “Micro-grooving of glass using micro-abrasive jet machining”, Journal of Materials Processing Technology 146 (2004) 234-240.
25.Jun Qua, Albert J. Shih, Ronald O. Scattergood, Jie Luo, “Abrasive micro-blasting to improve surface integrity of electrical discharge machined WC–Co composite”, Journal of Materials Processing Technology 166 (2005) 440–448.
26.A. Sayah , V.K. Parashar, A.-G. Pawlowski, M.A.M. Gijs, “Elastomer mask for powder blasting microfabrication”, Sensors and Actuators A125 (2005) 84–90.
27.M. Junkar, B. Jurisevic, M. Fajdiga, M. Grah, “Finite element analysis of single-particle impact in abrasive water jet machining”, International Journal of Impact Engineering 32 (2006) 1095–1112.
28.Taguchi, G., “Taguchi Methods in LSI Fabrication Process”, IEEE International Workshop on 2001 6th, (2001) 1-6.
29.Phadke, M. S., “Quality engineering using robust design”, AT& T Laboratories (1989).
30.Phadke, Madhav Shridhar, “Quality Engineering Using Robust Design”, AT&T Bell Laboratories (1988).
31.Khaw, F. C., B. S. Lim, and L. E. N. Lim, “Optimal Design of Neural Networks Using the Taguchi Method”, NeuralComputing 7 (1995) 225-245.
32.Lau, J.H. and C. Chang, “Taguchi Design of Experiment for Wafer Bumping by Stencil Printing”, IEEE Transactions on Electronics Packaging Manufacturing 233 (2000) 219-225.
33.B. R. Lawn, A. G. Evans, D. B. Marshall, “Elastic/plastic indentation damage in ceramics: the median/radial crack system”, J. Am. Ceram. 63(9) (1980) 574-581.
34.D. B. Marshall, “Geometrical effects in elastic/plastic indentation”, J. Am. Ceram. 64 (1981) 57-60.
35.P.D. Warren, “Determining the Fracture Toughness of Brittle Materials by Hertzian Indentation”, J Euro. ceram Soc 15 (1995) 385-394.
36.Lin, J.L., Wang, K.S., Yan, B. H., and Tarng, Y. S., “Optimization of the electrical discharge machining process based on the Taguchi method with fuzzy logics”, Journal of Materials Processing Technology 102 (2000) 48-55.
中文文獻
37.周祥東，「系統工程之回顧與前瞻」，第一屆系統工程講座講義，國防大學，2000。
38.林江龍，「放電加工電極消耗可靠度與製程參數最佳化研究」，國立中央大學機械工程學系博士論文，1999。
39.張季娜、羅仕勇、宋振昌、蔡璋文，「田口式品質工程導論」，中華民國品質管制學會，1992。
40.張耿維，「磁力研磨與電解磁力研磨之拋光特性研究」，國立中央大學機械工程學系博士論文，2003。
41.渡邊純二，「電子、光通訊用零件及結晶、陶瓷材料的超精密加工技術」，次世代磨粒加工技術研討會，中華民國磨粒加工學會，2000。
42.董光雄，「放電加工」，復文書局，p.26~29，1994。
43.蕭綱衡，「田口式參數設計在鐵礦燒結之應用研究」，中國統計學報，p.253~275，1990。
44.錢筑萍，「系統工程在產品開發過程之應用」，量測資訊第49期，p.16~21，1996。
45.簡文通，「機械製造」，全華科技圖書，2004。
46.魏濤，「精研法(上)」，機械月刊第二十一卷第十期，p247~259，1995。

指導教授

顏炳華(Biing-Hwa Yan)

審核日期

2006-7-16

推文