以微製程技術製備鋯鈦酸鉛壓電式微重量感測器

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姓名

廖昌昱(Chang Yu) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

以微製程技術製備鋯鈦酸鉛壓電式微重量感測器
(Microfabrication of PZT piezoelectric sensors for microgravimetric applications)

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摘要(中)

本論文使用溶膠凝膠法(sol-gel method)製備不同感測面積之鋯鈦酸鉛(PZT)薄膜，之後再利用旋轉塗佈法(spin-coating method)配合微製程技術製作出PZT壓電感測器。藉著X-Ray繞射實驗、電流密度、鐵電分析及阻抗量測，來分析壓電薄膜特性與品質。於本實驗微製程製備下，感測面積過大的試片，壓電薄膜常有較多的雜質與缺陷導致短路而失去本身特性，而以感測面積範圍從80 × 80 μm2到400 × 400 μm2於目前製程技術下特性較好也較易成功，且其共振頻率位於90 MHz~100 MHz之間。
另一部分為外部電路的建構，採用電晶體所組成之共振電路來驅動，並應用一般FM廣播接收IC，將類比共振頻率訊號轉換成直流電壓，最後使用Labview DAQ介面將系統連結至電腦，進而直接於電腦上觀察並監控感測訊號的變化。初步將水滴滴在感測晶片上可得到5~20 kHz的頻率變化，蛋白質(BSA)重量與頻率下降關係實驗方面，每95 ng之BSA所造成的頻率下降平均值為9.503206 kHz，標準差為0.538882 kHz，靈敏度為62.8 Hz cm2/ng
本實驗藉由微製程的技術使晶片微小化，提升晶片感測的靈敏度，並藉由周邊感測電路系統的整合製作，期望成為可攜式、高靈敏度及穩定的微重量感測系統，提供未來生物分子如蛋白質的重量感測。

摘要(英)

Our research adopted microfabrication technology to create miniaturized piezoelectric sensors from PZT thin films with different sensing areas prepared with sol-gel method. The characterization and quality of these sensors were examined through X-Ray diffracting measurements, leakage current density analysis, ferroelectricity analysis and impedance measurements. From the results of those analyses, sensors with larger detecting areas failed more easily due to more impurities and defects. Better performances could be obtained with sensor areas from 80 × 80 μm2 to 400 × 400 μm2, with which the resonant frequencies were between 90‐100 MHz.
The other part of our research was the construction of peripheral circuits. We built transistor-based resonant circuits with PZT devices. The resonant frequency was detected with a conventional FM receiver IC, which transformed the frequency signal into a voltage output. The output was observed and monitored on the computer. Preliminary experiments showed that dripping the water on the sensing area caused a frequency change of 5‐20 kHz.
Our miniaturization and using of PZT material led to portable, sensitive and stable piezoelectric sensors. We expect the sensor system to be applicable in protein sensing in the future.

關鍵字(中)

★ 鋯鈦酸鉛
★ 壓電感測器

關鍵字(英)

★ PZT
★ piezoelectric sensor

論文目次

第一章前言 1
1-1 生物感測器介紹 1
1-2 石英晶體微天平(QCM)介紹 3
1-2-1石英壓電晶體應用沿革 3
1-2-2 石英晶體介紹 7
1-2-3 QCM原理 9
1-2-4 QCM重量(mass)感測公式 10
1-2-5 QCM黏滯度(Viscosity)感測公式 12
1-3 壓電材料PZT介紹 13
1-4壓電感測器於微重量之應用 28
第二章研究背景 29
2-1 研究動機 29
2-2 研究目標 30
第三章壓電感測器製作 31
3-1 感測晶片製作 31
3-1-1 感測器結構與光罩設計 31
3-1-2 感測晶片製作 37
3-1-2-1 材料 37
3-1-2-2 基板的選取與處理 37
3-1-2-3 下電極之製作 39
3-1-2-4 壓電薄膜PZT之製備 39
3-1-2-5 上電極與補強層電極之製作 41
3-1-3 晶片製作流程圖與製程參數表 45
3-1-3-1 晶片製作流程圖 45
3-1-4 製程參數表 48
3-2 感測電路 52
3-2-1 材料 52
3-2-2 共振電路說明 52
3-2-3頻率轉換電壓電路 57
3-3 Labview監測畫面 64
3-3-1軟體介面建立方法 64
3-4 蛋白質感測實驗 68
3-4-1 材料 68
3-4-2 實驗方法 68
第四章實驗結果與討論 69
4-1 壓電薄膜分析 69
4-1-1薄膜表面元素分析 69
4-1-2 薄膜表面形貌分析 72
4-1-3 薄膜結晶方向分析 74
4-2 壓電感測器電性分析 80
4-2-1 電流-電壓量測分析 80
4-2-3電容-電壓與介電常數量測分析 102
4-2-4 阻抗量測分析 111
4-3振盪電路實現 120
4-3-1 共振電路 120
4-3-1-1共振電路Layout 120
4-3-2 頻率轉換電壓電路 125
4-3-2-1頻率轉換電壓電路Layout 125
4-3-3 分壓電路 130
4-3-3-1 分壓電路Layout 130
4-3-4 可攜式系統 132
4-4 監測介面 134
4-5 壓電感測器感測結果分析 136
4-5-1 感測系統初步測試 136
第五章結論 143
參考文獻 144

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指導教授

蔡章仁(Jang Zern Tsai)

審核日期

2007-7-21

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